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Continuous FTIR Gas Analyzer, MultiGas™ 2030, ppb to ppm Sensitivity


  • Measurement Technique
    FTIR Spectrometry
  • Measurable Gases & Vapors
    Most molecules except for N2, H2, and O2
  • Measurable Range
    Concentration setting between 10ppb and 100% full scale
  • FTIR
    2102 Process FTIR
  • Spectral Resolution
    0.5 - 128cm-1
  • Scan Speed
    1 scan/sec @ 0.5cm-1
  • Scan Time
    1-300 sec
  • Infrared Source
    Silicon Carbide @ 1200°C
  • Reference Laser
    Helium Neon (15798.2cm-1)
  • Detector
    LN2 -cooled MCT; TE -cooled MCT
  • Purge Pressure
    20 psig (1.5 bar) max.
  • Spectrometer Purge Flow
    0.2 L/min of dry nitrogen or CO2 free clean dry air with dewpoints below -70°C
  • Optics Purge Flow
    0.2 L/min of dry nitrogen or CO2 free clean dry air with dewpoints below -70°C
  • Pressure Transducer
    MKS Baratron®
  • Purge Connection
    Swagelok® quick connect
  • Computer Requirements
    Desktop or notebook Intel Pentium® PC under Microsoft® Windows® xP; display (1024 x 768)
  • Communication
    RJ-45 cross-over Ethernet
  • Dimensions
    17.5 in. W x 12.5 in. H x 25.5 in. D
  • Power Requirements
    120 or 240 VAC, 50/60 Hz, 3 amps
  • Weight
    110 lbs. (50 kg)
  • Sample Temperature
    Ambient to 200°C (calibration temperature dependent)
  • Sample Flow
    0.2 - 10 L/min
  • Sample Pressure
    0.01 - 4 atm (calibration pressure dependent)
  • Gas Cell Materials
    Nickel coated Al; Welded 316 stainless steel optional
  • Fittings
    ¼" Swagelok®, ¼" VCR®
  • Tubing
    Heated ¼" stainless steel
  • Mirrors
    Nickel plated aluminum substrate, with rugged gold coating
  • Windows
    KBr; CaF2 (others available)
  • O-rings
    Viton® (others available)


2102 Process FTIR Spectrometer

The MultiGas 2030 Analyzer is composed of a 2102 Process FTIR Spectrometer, our patented, high-optical-throughput sampling cell, applications-specific analysis software, and an instrument independent quantitative spectral library. The 2102 Process FTIR Spectrometer is compact and rugged. Capable of operating at spectral resolutions up to 0.5 cm-1, it is the fastest, most sensitive and stable process FTIR available. In addition, it can operate in hostile environments with a high degree of immunity to vibration and temperature changes. An advanced, high-speed data processing system is standard, and provides low-noise infrared spectra for analysis.

2102 Process FTIR Spectrometer

Multi-pass Gas Cell

This spectrometer is coupled to a patented low volume (200 mL) multi-pass gas cell with a 5.11 meter effective pathlength. The patented design of this cell incorporates aspheric, aberration-correcting mirrors which provide more than twice the optical throughput of a conventional multipass gas cell. Alternatively, a single-pass gas cell can be used for corrosive gases or strongly-absorbing gases at high concentrations. Either cell can be operated from ambient temperature to 191°C.

The 5.11m pathlength, 200 mL volume, long path gas cell measures 8-1/2” x 2” x 3-1/2”, and uses a patented aberration correcting optics for maximum sensitivity

Spectral Analysis

The MultiGas 2030 analyzer features robust quantitative analysis software, which can analyze and report concentrations for dozens of compounds simultaneously. The software, which operates on a personal computer, performs automatic corrections for gas temperature and pressure variations, which are measured directly by the analyzer. Samples can be acquired and analyzed in less than a second, making transient analysis possible.

During data collection the MultiGas software continuously acquires and processes spectra while computing the concentrations of the gases that are selected in the setup. Display formats include concentration histories in graphical and tabular formats, the measured spectrum and spectral residuals. The residual spectrum can be utilized to visually determine error in the analysis, making QA/QC checking easy and straight forward to accomplish. The spectral residuals represent the “left-over” spectral information once all the reference spectra have been accounted for. Once spectra have been collected and saved, these spectra may be reprocessed at any time using the same or different calibration sets.

Residual Spectra: Calibration Subtracted from Sample Demonstrates Analysis Quality

Instrument Independent Calibration

The MultiGas software features multi-point calibration curves that provide a dynamic range up to 9 orders of magnitude (ppb to 100%). Calibrations for many species are provided with the instrument, and additional calibrations can be generated by the user from gases of known concentration. Utilities in the MultiGas software verify the performance of each instrument, which allows a calibration generated on one MultiGas to be used on any other MultiGas without alteration.

Graphical User Interface for Calibration


  • Stack monitoring (environmental compliance)
  • Process monitoring, development and optimization
  • Ambient air analysis (industrial hygiene)
  • Bulk gas purity analysis
  • Combustion emissions monitoring
  • SCR - selective catalytic reduction performance monitoring

Time Lines from Semiconductor Process

Detection Limits

Low-level detection limits for the 5.11 meter gas cell and a mercury-cadmium-telluride (MCT) detector at 0.5 cm-1 resolution for typical gases in the absence of interfering species are as follows:

Name Formula Lowest Detectable Limit*
Ammonia NH3 0.5 ppm
Carbon Dioxide CO2 0.2 ppm
Carbon Monoxide CO 1.2 ppm
Formaldehyde H2CO 0.6 ppm
Hydrogen Chloride HCl 1.5 ppm
Hydrofluoric Acid HF 0.2 ppm
Methane CH4 0.6 ppm
Nitrogen Dioxide NO2 0.4 ppm
Nitric Oxide NO 3.6 ppm
Nitrogen Trifluoride NF3 0.5 ppm
Silicon Tetrafluoride SiF4 0.15 ppm
Sulfur Dioxide SO2 0.6 ppm
Tetrafluoromethane CF4 40 ppb
Xylenes C8H10 1.0 ppm

* With 20/20™ cell and 1 sec measurement

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