Compare Model Drawings, CAD & Specs Availability Price
ghw rf plasma generator
RF Plasma Generator, 1.25 kW, 13.56 MHz, GHW Series
ghw rf plasma generator
RF Plasma Generator, 2.5 kW, 13.56 MHz, GHW Series
ghw rf plasma generator
RF Plasma Generator, 5.0 kW, 13.56 MHz, GHW Series

Specifications

  • Type
    GHW Series 13.56 MHz RF Plasma Generator
  • Frequency
    13.56MHz ±0.005%
  • Power Output
    GHW-12: 1250 W
    GHW-25: 2500 W
    GHW-50: 5000 W
  • Load Impedance Range
    Unlimited
  • RF Stability/Spurious Output
    Unconditionally stable for any load within operational limits < -45dBc
  • Harmonic Output & Distortion
    < -40dBc
  • Load Mismatch Protection
    GHW-12: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.
    GHW-25, GHW-50: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 20% of rated power.
  • Regulation Tolerance
    GHW-12: >125 W: ±1.5% SP, <125 W: ± 3.0 W
    GHW-25: >250 W: ±1.5% SP, <250 W: ± 6.0 W
    GHW-50: >500 W: ±1.5% SP, <500 W: ± 10.0 W
  • Input AC Power
    GHW-12: 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
    GHW-25: 200/208 VAC, 3/PE~ (3W+G) 15 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
    GHW-50: 200/208 VAC, 3/PE~ (3W+G) 30 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 15 A/PHASE
  • RF Connector
    Type N
  • Interface
    Standard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available.
  • Readout
    Digital readout displays frequency and forward, reflected and load power.
  • Rack Mounting
    EIA (Standard) 19-inch adapters supplied
  • Cooling System
    GHW-12: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.
    GHW-25, GWH-50: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread.
  • Dimensions
    GHW-12: 3.5 inches x 19 inches rack mount x 20.0 inches (89 x 483 x 508 mm.)
    GHW-25: 5.25 inches x 19 inches rack mount x 20.5 inches (133 x 483 x 521 mm.)
    GHW-50: 8.72 inches x 19 inches rack mount x 22.1 inches (221 x 483 x 560 mm.)
    (H x W x D, excluding handles & connectors)
  • Weight
    GHW-12: 32.5 lbs. (14.8 kg)
    GHW-25: 55 lbs. (24.9 kg)
    GHW-50: 91 lbs. (41.3 kg)
  • Compliance
    CE, CAN/CSA-C22.2 No. 61010-1, UL 61010-1

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