Compare Model Drawings, CAD & Specs Frequency Dynamic Power Range Availability Price
ghw rf plasma generator
RF Plasma Generator, 1.25 kW, 13.56 MHz, GHW Series
13.56 MHz ±0.005% 10 - 1250 W
ghw rf plasma generator
RF Plasma Generator, 2.5 kW, 13.56 MHz, GHW Series
13.56 MHz ±0.005% 10 - 2500 W
ghw rf plasma generator
RF Plasma Generator, 5.0 kW, 13.56 MHz, GHW Series
13.56 MHz ±0.005% 10 - 5000 W

Specifications

  • Type
    GHW Series 13.56 MHz RF Plasma Generator
  • Frequency
    13.56MHz ±0.005%
  • Power Output
    GHW-12: 1250 W
    GHW-25: 2500 W
    GHW-50: 5000 W
  • Load Impedance Range
    Unlimited
  • RF Stability/Spurious Output
    Unconditionally stable for any load within operational limits < -45dBc
  • Harmonic Output & Distortion
    < -40dBc
  • Load Mismatch Protection
    GHW-12: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.
    GHW-25, GHW-50: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 20% of rated power.
  • Regulation Tolerance
    GHW-12: >125 W: ±1.5% SP, <125 W: ± 3.0 W
    GHW-25: >250 W: ±1.5% SP, <250 W: ± 6.0 W
    GHW-50: >500 W: ±1.5% SP, <500 W: ± 10.0 W
  • Input AC Power
    GHW-12: 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
    GHW-25: 200/208 VAC, 3/PE~ (3W+G) 15 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
    GHW-50: 200/208 VAC, 3/PE~ (3W+G) 30 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 15 A/PHASE
  • RF Connector
    Type N
  • Interface
    Standard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available.
  • Readout
    Digital readout displays frequency and forward, reflected and load power.
  • Rack Mounting
    EIA (Standard) 19-inch adapters supplied
  • Cooling System
    GHW-12: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.
    GHW-25, GWH-50: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread.
  • Dimensions
    GHW-12: 3.5 inches x 19 inches rack mount x 20.0 inches (89 x 483 x 508 mm.)
    GHW-25: 5.25 inches x 19 inches rack mount x 20.5 inches (133 x 483 x 521 mm.)
    GHW-50: 8.72 inches x 19 inches rack mount x 22.1 inches (221 x 483 x 560 mm.)
    (H x W x D, excluding handles & connectors)
  • Weight
    GHW-12: 32.5 lbs. (14.8 kg)
    GHW-25: 55 lbs. (24.9 kg)
    GHW-50: 91 lbs. (41.3 kg)
  • Compliance
    CE, CAN/CSA-C22.2 No. 61010-1, UL 61010-1

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