The DA06A Baratron® Capacitance Manometer provides three decades of pressure output with enhanced accuracy and calibration points from 1 Torr to 1 mTorr for advanced processes like etch and deposition. Designed with a wide and high accuracy pressure range, a single DA06A can be used in place of multiple manometers, thereby simplifying system integration, reducing overall system mechanical and electrical hardware and cabling, and freeing up valuable process chamber space.
The following options are available for DA06A Baratron® Heated Capacitance Manometers
Ordering Code Example: DA06A01TCEL31BAA0H00
|Configuration Option||Option Code|
|DA06A Absolute Manometer||DA06A|
|Units of Measurement (corresponds to digital output units)|
|1/2 in. OD tube||BA|
|8 VCR female||CE|
|8 VCR male||CF|
|15-pin D with Screw Locks||B|
|15-pin D with Slide Lock Posts||P|
|Trip Point A Above Set Point, Trip Point B Above Set Point||AA|
|Trip Point A Above Set Point, Trip Point B Below Set Point||AB|
|Trip Point A Below Set Point, Trip Point B Below Set Point||BB|
|Trip Point A Below Set Point, Trip Point B Above Set Point||BA|
|Reserved for Future Use||0|
1 For CE compliance, the mating electrical connector must be properly grounded.
2 Units with trip points have default set points of 50% of Full Scale, a default hysteresis of 5%, and actuation direction based on the part number code. The settings are user adjustable through EtherCAT.
* Custom part numbers can be requested for copy exact applications.
** Standard part numbers will ship with the latest firmware at the date of manufacture. A custom part number should be requested for locked firmware/EtherCAT ESI file.