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Dissolved Carbon Dioxide (DI-CO2) Ultrapure Water Delivery System
Overview
The DI-CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and/or corrosion by creating UPW (ultrapure water) with precisely defined conductivity. It is a compact system for tool integration, providing conductive DI-CO2 water (Carbon Dioxide) with closed loop controlled conductivity. The conductivity is kept at a constant value under changing flow conditions by control of the CO2 concentration in the DI-CO2 water.
- Closed-loop conductivity control
- Small, compact module for integration
- Low cost of ownership, no CO2 and no UPW consumption at process pauses
- Maximum conductivity at physical limits
- Highest accuracy
- Flow is allowed to change between 0.5 - 90 L/min to keep conductivity stable
Products
Specifications
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TypeCarbon Dioxide Ultrapure Water Delivery System
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Flow RateMinimum total flow: 0.5 L/min (0.1 gpm)
Maximum total flow: 90 L/min (15.8 gpm) -
CommunicationBinary in/out (dry contacts)
RS232, analog out
USB -
AccuracyTypical maximum deviation from set point:
Steady state flow: ±3%
Fluctuating flow: ±10% for flow changes <4 L/min per sec -
UPW Temperature Range20 - 50°C
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Outlet Pressure1.0 - 3.0 barg (0.1 - 0.3 MPag, 14.5 - 43.5 psig), depending on UPW supply pressure
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Conductivity/Resistivity RangeMinimum conductivity 5 µS/cm, max. resistivity 200 kOhm*cm
Maximum conductivity 50 µS/cm, min resistivity 20 kOhm*cm -
Plumbing MaterialsLiquid contacted surfaces: PFA, PVDF
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Cabinet MaterialPVDF or C-PVC or FRPP
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Dimensions386 x 650 x 232 mm (WxHxD)
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Weight17.3 kg
Resources
Drawings And Cad
- DI-CO2 Dimensional Drawing (140.4 kB, PDF)
Literature
- DI-CO2 Compact Carbon Dioxide Ultrapure Water Delivery System (251.6 kB, PDF)
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