The DI-CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and/or corrosion by creating UPW (ultrapure water) with precisely defined conductivity. It is a compact system for tool integration, providing conductive DI-CO2 water (Carbon Dioxide) with closed loop controlled conductivity. The conductivity is kept at a constant value under changing flow conditions by control of the CO2 concentration in the DI-CO2 water.
DI-SOLVER CO2 Carbonated Ultrapure Water Delivery Systems are available with the following options.
Ordering Code Example: 16-001A-BCDEF
|5 - 40 µS/cm (200 - 25 kOhm*cm)||0|
|Super 300 Type Pillar Fitting||0|
|Customer Specific Features|