Overview

The DI-SOLVER CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and/or corrosion by creating UPW (ultrapure water) with precisely defined conductivity. It is a compact system for tool integration, providing conductive DI-CO2 water (carbonated ultra-pure water) with closed loop controlled conductivity. The conductivity is kept at a constant value under changing flow conditions by control of the CO2concentration in the DI-CO2 water.

• Closed-loop conductivity control
• Small, compact module for integration
• Low cost of ownership, no CO2 and no UPW consumption at process pauses
• Maximum conductivity at physical limits
• Highest accuracy
• Flow is allowed to change between 0.5 - 90 L/min to keep conductivity stable