DI-SOLVER CO2 Compact Carbonated Ultrapure Water Delivery System

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di-solver co2 compact carbonated water delivery system

Overview

The DI-SOLVER CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and/or corrosion by creating UPW (ultrapure water) with precisely defined conductivity. It is a compact system for tool integration, providing conductive DI-CO2 water (carbonated ultra-pure water) with closed loop controlled conductivity. The conductivity is kept at a constant value under changing flow conditions by control of the CO2concentration in the DI-CO2 water.

Closed-loop conductivity control
Small, compact module for integration
Low cost of ownership, no CO2 and no UPW consumption at process pauses
Maximum conductivity at physical limits
Highest accuracy
Flow is allowed to change between 0.5 - 90 L/min to keep conductivity stable

Specifications

Type

Carbonated Ultrapure Water Delivery System
Flow Rate

Minimum total flow: 0.5 L/min (0.1 gpm)
Maximum total flow: 90 L/min (15.8 gpm)
Communication

Binary in/out (dry contacts)
RS232, analog out
USB
Accuracy

Typical maximum deviation from set point:
Steady state flow: ±3%
Fluctuating flow: ±10% for flow changes <4 L/min per sec
UPW Temperature Range

20 - 50°C
Outlet Pressure

1.0 - 3.0 bar_g (0.1 - 0.3 MPa_g, 14.5 - 43.5 psig), depending on UPW supply pressure

Conductivity/Resistivity Range

Minimum conductivity 5 µS/cm, max. resistivity 200 kOhm*cm
Maximum conductivity 50 µS/cm, min resistivity 20 kOhm*cm
Plumbing Materials

Liquid contacted surfaces: PFA, PVDF
Cabinet Material

PVDF or C-PVC or FRPP
Dimensions

386 x 650 x 232 mm (WxHxD)
Weight

17.3 kg

Specifications

Type

Carbonated Ultrapure Water Delivery System
Flow Rate

Minimum total flow: 0.5 L/min (0.1 gpm)
Maximum total flow: 90 L/min (15.8 gpm)
Communication

Binary in/out (dry contacts)
RS232, analog out
USB
Accuracy

Typical maximum deviation from set point:
Steady state flow: ±3%
Fluctuating flow: ±10% for flow changes <4 L/min per sec
UPW Temperature Range

20 - 50°C
Outlet Pressure

1.0 - 3.0 bar_g (0.1 - 0.3 MPa_g, 14.5 - 43.5 psig), depending on UPW supply pressure

Conductivity/Resistivity Range

Minimum conductivity 5 µS/cm, max. resistivity 200 kOhm*cm
Maximum conductivity 50 µS/cm, min resistivity 20 kOhm*cm
Plumbing Materials

Liquid contacted surfaces: PFA, PVDF
Cabinet Material

PVDF or C-PVC or FRPP
Dimensions

386 x 650 x 232 mm (WxHxD)
Weight

17.3 kg