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The DI-CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and/or corrosion by creating UPW (ultrapure water) with precisely defined conductivity. It is a compact system for tool integration, providing conductive DI-CO2 water (Carbon Dioxide) with closed loop controlled conductivity. The conductivity is kept at a constant value under changing flow conditions by control of the CO2 concentration in the DI-CO2 water.
DI-SOLVER CO2 Carbonated Ultrapure Water Delivery Systems are available with the following options.
Ordering Code Example: 16-001A-BCDEF
Configuration Option |
Option Code |
---|---|
DI-SOLVER CO2 | 16-001 |
Conductivity Range | |
5 - 40 µS/cm (200 - 25 kOhm*cm) | 0 |
Conductivity Measurement | |
Integrated Sensor | 0 |
External Sensor | 1 |
Connection | |
Super 300 Type Pillar Fitting | 0 |
Flaretek® | 1 |
Housing Material | |
PVDF | 0 |
C-PVC | 1 |
FRPP | 2 |
Reserved | |
Reserved | 0 |
Customer Specific Features | |
Standard | 0 |