Installation/Application of the MKS Rapid Isolation Valve

More about the Rapid Isolation Valve here

photo - MKS Rapid Isolation Valve in a typical diffusion tool configuration

In most applications, there are two isolation valves in the vacuum foreline; one near the chamber exit for process isolation and one directly upstream of the pump for preventative maintenance work.

The Rapid Isolation Valve can be triggered a number of ways, including:

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.