946 Vacuum System Controller Cold Cathode Vacuum Gauge Controller

More about the 946 Vacuum System Controller here

946 Controller
Display 320x240 color QVGA TFT LCD with back lighting.
Up to 6 pressure or flow displays.
Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position.
Compatible Sensors/Transducers MKS Baratron® capacitance manometers providing 0 to 10 VDC output*
MKS Pirani sensors
MKS convection Pirani sensors
MKS cold cathode ionization sensors - Series 423, 431 and 422
MKS hot cathode ionization sensors (nude & MIG types)
*Limited to power requirements of ≤1 amp, cable connections and Full Scale ranges.
Compatible Mass Flow Controllers MKS Mass-Flo® MFCs
MKS G, I, & P-Series MFCs
MKS legacy MFCs
Any MFC requiring ±15 VDC or +15 to +24 VDC, 0-5 VDC set point and standard 15 pin or 9 pin D-sub cable connection.
Compatible Pressure Control Valves MKS 248A, 148J, 154A (solenoid control valve)
153D and T3Bi (exhaust throttle valves)
Pressure Measurement Range 10,000 Torr to 10-11 Torr
(Dependent upon sensor type)
Measurement Range 1.0 x 10-11 to 10,000 Torr
1.0 x 10-11 to 2.7 x 10+4 mbar
1.0 x 10-9 to 2.7 x 10+6 Pascal
1.0 x 10-8 to 2.0 x 10+7 microns
Pressure Units Torr, mbar, Pascal
Flow Units sccm and slm
Operating Temperature 5° to 40°C (41° to 104°F)
Storage Temperature 10° to 55°C (50° to 131°F)
Relative Humidity 80% max for temperatures less than 31°C, decreasing linearly to 50% maximum at 40°C
Size 1/2 rack, 2U High, 13 inches deep
Power Requirement & Consumption 150 watts maximum 100 - 240 VAC 50/60 Hz
Set Point Relays Twelve pressure dependent set points (4 per card slot)
SPST relays, contact rating 2 amps @ 30 VAC
Output Buffered, log linear and linear output for each channel and log linear for combined channels
Front Panel Controls Power on-off switch, setup and operational commands can be accessed via the keypad
Insulation Coordination Over voltage Category II, Pollution Degree 2
Certification 2004/108/EC EMC Directive
2006/95/EC Low Voltage Directive
(with appropriate sensors)
Dimensions Half 19 inch Rack, 2U, 3.47 x 9.47 x 13.00 inches
Weight 8 lbs. (3.6 kg)

Specifications are subject to change without notice.
Copyright MKS Instruments, Inc. unless noted otherwise.

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Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-652-4400.