Specifications

946 Vacuum System Controller Cold Cathode Vacuum Gauge Controller

More about the 946 Vacuum System Controller here

946 Controller
Display 320x240 color QVGA TFT LCD with back lighting.
Up to 6 pressure or flow displays.
Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position.
Compatible Sensors/Transducers MKS Baratron® capacitance manometers providing 0 to 10 VDC output*
MKS Pirani sensors
MKS convection Pirani sensors
MKS cold cathode ionization sensors - Series 423, 431 and 422
MKS hot cathode ionization sensors (nude & MIG types)
*Limited to power requirements of ≤1 amp, cable connections and Full Scale ranges.
Compatible Mass Flow Controllers MKS Mass-Flo® MFCs
MKS G, I, & P-Series MFCs
MKS legacy MFCs
Any MFC requiring ±15 VDC or +15 to +24 VDC, 0-5 VDC set point and standard 15 pin or 9 pin D-sub cable connection.
Compatible Pressure Control Valves MKS 248A, 148J, 154A (solenoid control valve)
153D and T3Bi (exhaust throttle valves)
Pressure Measurement Range 10,000 Torr to 10-11 Torr
(Dependent upon sensor type)
Measurement Range 1.0 x 10-11 to 10,000 Torr
1.0 x 10-11 to 2.7 x 10+4 mbar
1.0 x 10-9 to 2.7 x 10+6 Pascal
1.0 x 10-8 to 2.0 x 10+7 microns
Pressure Units Torr, mbar, Pascal
Flow Units sccm and slm
Operating Temperature 5° to 40°C (41° to 104°F)
Storage Temperature 10° to 55°C (50° to 131°F)
Relative Humidity 80% max for temperatures less than 31°C, decreasing linearly to 50% maximum at 40°C
Size 1/2 rack, 2U High, 13 inches deep
Power Requirement & Consumption 150 watts maximum 100 - 240 VAC 50/60 Hz
Set Point Relays Twelve pressure dependent set points (4 per card slot)
SPST relays, contact rating 2 amps @ 30 VAC
Output Buffered, log linear and linear output for each channel and log linear for combined channels
Front Panel Controls Power on-off switch, setup and operational commands can be accessed via the keypad
Insulation Coordination Over voltage Category II, Pollution Degree 2
Certification 2004/108/EC EMC Directive
2006/95/EC Low Voltage Directive
(with appropriate sensors)
Dimensions Half 19 inch Rack, 2U, 3.47 x 9.47 x 13.00 inches
Weight 8 lbs. (3.6 kg)

Specifications are subject to change without notice.
Copyright MKS Instruments, Inc. unless noted otherwise.

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Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-652-4400.