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See how MKS surrounds the Semi process with this interactive process diagram.

Semiconductor

Semiconductor device fabrication involves various processing steps which fall into four general categories: deposition, removal, patterning, and modification of electrical properties.

Ultra thin layers, smaller critical dimensions, new materials and structures, and the ongoing necessity for higher yield and productivity drive the need for tighter process measurement and control within each of these areas.

MKS Instruments, Inc. has a portfolio of technologies that are essential for enhanced uptime, optimized yield and throughput, and improved productivity. These solutions include pressure measurement and control, materials delivery, gas composition analysis, data control and analysis, power and reactive gas generation, and vacuum technology.