Semiconductor
Semiconductor device fabrication involves various processing steps which fall into four general categories: deposition, removal, patterning, and modification of electrical properties.
Ultra thin layers, smaller critical dimensions, new materials and structures, and the ongoing necessity for higher yield and productivity drive the need for tighter process measurement and control within each of these areas.
MKS Instruments, Inc. has a portfolio of technologies that are essential for enhanced uptime, optimized yield and throughput, and improved productivity. These solutions include pressure measurement and control, materials delivery, gas composition analysis, electrostatic charge management, data control and analysis, power and reactive gas generation, and vacuum technology.
Applications Information:
See how MKS surrounds the SEMI process.
AMD Employs ESD Control for Photomasks
Atomic Layer Deposition (ALD) Process Solutions from MKS Instruments
Broadband Interference Issues in Fabs
Chemical Vapor Deposition Deposition (CVD) Process Solutions from MKS Instruments
Controlling Electrostatic Attraction of Particles in Production Equipment
Dry Etch Process Solutions from MKS Instruments
Electrostatics Management in Cleanrooms
EMI/ESD Pulse Ionizer Interference Issues
Improving Particle Contamination Control with In-tool Air Ionization
In 300mm Contamination Control, Watch out for Electrostatic Attraction
Investigating FOUPs as a Source of ESD-induced Electromagnetic Interference
Investigating a New Generation of ESD-Induced Reticle Defects
Investigating Static Charge issues in Photolithography Areas
It's The Hardware. No, Software. No, It's ESD
MiniPulse ESD Sensor - Application Embedded ESD Detector
NanoPulse ESD/EMI/RFI Sensor - Separating ESD from all the Rest
Real-World Improvement in Ionization System Performance
Special Techniques for Detecting ESD Events in EMS Manufacturing Facilities - Finding ESD in Production Lines
Tool Installation Site Survey - ESD/EMI/ELF
Tool Interference Issues - ESD/EMI/RFI
© 2009 by MKS Instruments