CRV CORROSION RESISTANT
ANGLE & INLINE VALVES
Designed for use in harsh environments, the patented CRV corrosion and ozone resistant valve seals the valve bellows while the valve is in the open position, which protects it from corrosive process gases. The CRV provides long life, easy maintenance and cleanliness in harsh environments such as semiconductor and solar processes.
IP66 RATED, RELIABLE & COST EFFECTIVEFOR INDUSTRIAL ENVIRONMENTS
Designed for use in harsh environments where resistance to liquid or dustingress is essential, the I-Series Mass Flow Controllers are available withanalog or digital I/O, the latest digital flow control electronics and proven,patented thermal sensor and mechanical design for precise control intoday's rigorous industrial applications.
ENERGY EFFICIENT, HIGH PERFORMING,ENHANCED THERMAL DESIGN
The Series HT High Temperature Mantle Heaters are a cost effective,clean room compatible method for heating process lines and componentson leading-edge process equipment. Enabling continuous operation oftemperatures up to 260°C, and with three distinct construction options,the Series HT Heaters are designed to suit a broad range of applications.
HIGH OUTPUT DELIVERY DIO3 FORACCURATE CLOSED LOOP CONTROL
The LIQUOZON® Stream Ozonated Water Delivery System is a powerfulsource of dissolved ozone for wet wafer processing in multi-chamber,single wafer tools delivering a stable ozone concentration under constantcontrolled pressure even for varying DIO3 demands. Designed for use inapplications requiring high output performance.
HIGHLY RELIABLE, LONG-LIFEVACUUM MEASUREMENT
The Granville-Phillips® Series 500 Cold Cathode Vaccum Gauge defines a new accuracy standard based on innovative technology and time-tested calibration techniques. This cold cathode technology provides longer lifetime with a new, patent-pending method to determine its longevity.
MKS acquires Precisive Instruments real-time composition sensor platform
MKS introduces the I-Series family of high flow mass flow controllers with precise control and accuracy for flow rates up to 1000 slm
Cirrus™3-XDAtmospheric Systems with V-lens™ Technology
Designed for researchers and engineers working beyond the limits of conventional quadrupole MS gas analysis.