MULTI-GAS, MULTI-RANGEMASS FLOW CONTROL
MKS introduces two new flow control solutions - the P-Series
and G-Series multi-gas, multi-range Mass Flow Controller families.
These high performance MFCs feature full digital control
architecture for fast response to setpoint over operable device
range - the perfect solution for virtually any application.
CRV CORROSION RESISTANT
ANGLE & INLINE VALVES
Designed for use in harsh environments, the patented CRV corrosion and
ozone resistant valve seals the valve bellows while the valve is in the open
position, which protects it from corrosive process gases. The CRV provides
long life, easy maintenance and cleanliness in harsh environments
such as semiconductor and solar processes.
FTIR-BASED CONTINUOUSEMISSIONS MONITORING
Presenting the MGS300 System - a fully integrated and certified
continuous emissions monitoring system based on high resolution
FTIR technology. The MGS300 provides real-time analysis for a
broad range of gas components over the most challenging of
ALL-IN-ONE TEMPERATURECONTROL SOLUTION
For the latest in semiconductor, solar and MOCVD applications,
MKS offers the MultiTherm 1000 Temperature Controller featuring
16 precision sensor input channels and 16 PWM output channels.
Built-in PID makes this unit ideal for dynamic control applications
where extreme temperature stability is required.
REMOTE PLASMA SOURCE FORNEW PROCESS APPLICATIONS
The new ASTRON® Paragon Reactive Gas Generator is the latest platform
in the industry leading family of ASTRON remote plasma sources.
Building on the production proven attributes of existing ASTRON
reactive gas generators, Paragon is designed with improvements
to enable the next generation of process development.
MKS Completes Acquisition of Granville-Phillips®, a leading global provider of vacuum measurement and control instruments
MKS Instruments reports 2014 third quarter financial results
The new 902B Absolute Piezo Vacuum Transducer -
Integrates a MEMS-based Piezo sensor with a metal sealed, stainless steel 316 diaphragm and integrated electronics to provide seamless, gas-independent vacuum/pressure measurement.