SEMOZON® AX8550 2-Channel, Standalone Ozone Delivery Systems

THE SEMOZON AX8550 is designed for high flow, high concentration, ultra-clean ozone generation and delivery. The AX8500 is uniquely suited for ozone applications in semiconductor fabrication. Ozone is an environmentally friendly alternative to many chemical processes. It has a high redox potential, can be generated at the point of use and is easily converted back to oxygen. Typical ozone applications include TEOS/Ozone CVD, Ta2O5 CVD, photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.

AX8500 Series systems may be configured with one or two SEMOZON AX8400 series ozone generators with a choice of common or independent, dual-channel gas flow control. Performance features include closed-loop concentration monitoring and control, status monitoring, interface to tool and back pressure control. The power distribution module incorporates overcurrent and ground fault protection. The cooling water distribution panel includes filter, pressure indication and flow control.

The AX8550 system is modular to provide maximum uptime and minimum complexity. All modules are housed in a vented 19-inch rack. Systems are S2-0302 and CE Compliant and are safety and performance interlocked for rack exhaust, water flow, water leak and open door/panels.