HPS® Vacuum Transducers, Vacuum Gauges, Sensors & Controllers
(Pressure & Vacuum Gauge Measurement from 1x10-11 to 1500 Torr)

For vacuum measurement from 10-11 to 1500 Torr, MKS offers a broad range of vacuum and pressure measurement solutions (vacuum gauges, transducers, sensors, & controllers) based on multiple pressure measurement technologies including Pirani, convection Pirani, piezo, hot cathode, cold cathode and a new MEMS-based multi-sensor technology. These vacuum gauge and vacuum transducer products are used individually or are integrated in combination, providing a wide variety of pressure and vacuum measurement options in terms of gas independence, covered pressure ranges and tolerance to aggressive gases. The MKS Instruments vacuum gauge line includes Series 900 vacuum transducers which are vacuum sensors and electronics combined into a single device, eliminating the need for an external power supply controller, as well as the traditional, easy-to-operate vacuum gauge controller/sensor combination.

Try this Interactive Vacuum Gauge Selection Tool


Above Atmosphere to Medium Vacuum Transducers (1.0x10-5 to 760 Torr)
Medium to Ultra High Vacuum Transducers (3.0x10-10 to 5X10-2 Torr)
Atmosphere to Ultra High Vacuum Transducers (5.0x10-10 to Atmosphere)
Vacuum Sensors
Controllers for Vacuum Gauges & Sensors
Cables, Parts & Accessories for Vacuum Gauge Controllers, Sensors & Transducers


MKS Instruments Vacuum Component Product Line
Gauge Controller selection guide
UHV Gauging for High Energy Physics
Series 900 selection guide
Vacuum Pressure Measurement
Shrinking the Pirani Vacuum Gauge
Enhanced Ignition of Cold Cathode Gauges Through the Use of Radioactive Isotopes
Long Term Measurement Stability of an Inverted Magnetron Cold Cathode Gauge
Pressure Measurement in Ion Implanters
Safety and Health Considerations Related to Vacuum Gauging
Gas Correction Factors for Ionization Vacuum Gauges
MKS, HPS® Products in "Manufacturing Marvels®" video
Vacuum Gauge/Sensor manual archive
SmartPhone version of this page


Need help?

Contact an Application Specialist by sending an email to MKS, HPS® Products or call 303-449-9861.