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Legacy Indirect Vacuum Gauges & Controllers


Below is a list of older indirect vacuum measurement products and links to their recommended current replacements. These recommended replacement products are the closest match for most common applications. In some cases, the newer product is not a direct replacement for the older product. Contact MKS Instruments for assistance in these situations.

Legacy Product Recommended Replacement
903 Inverted Magnetron Cold Cathode Vacuum Transducer 500 Cold Cathode Gauge Module
909AR Digital and Analog Hot Cathode Vacuum Transducer 354 Micro-Ion® Module
979B Atmosphere to Vacuum Transducer 392 Micro-Ion® Plus Micro-Ion/Conductron Module
999 Quattro Multi-Sensor Vacuum Transducer with Atmospheric Switching 390 Micro-Ion® ATM Micro-Ion/Conductron/Piezo Module
356 Micro-Ion® Plus Modules 392 Micro-Ion® Plus Micro-Ion/Conductron Module
385 Convectron® ATM Module 910 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer
316 Low Vacuum Gauge Controllers 475 Convectron® Gauge Controller
345 Pirani Vacuum Sensors 275 Convectron® Pirani Vacuum Gauge
317 Convection-Enhanced Pirani Vacuum Sensors 275 Convectron® Pirani Vacuum Gauge
Mini Ion Gauge (MIG), Hot Cathode Ionization Vacuum Sensor 355 Micro-Ion® Bayard-Alpert Vacuum Gauges
Nude Hot Cathode Ionization Vacuum Sensor 274 Nude Bayard-Alpert Type Ionization Vacuum Gauge
943 Cold Cathode Vacuum Gauge Controller 937B Digital Combination Vacuum Gauge Controller
945 Pirani Vacuum Gauge Controller 475 Convectron® Gauge Controller
947 Convection-Enhanced Pirani Vacuum Gauge Controller 475 Convectron® Gauge Controller
905 MicroPirani™ Vacuum Sensor Kit Contact Applications Engineering for assistance

Here is a complete index of current indirect vacuum gauges, sensors, transducers, modules, and vacuum controllers from MKS Instruments.


Products

316 Low Vacuum Gauge Controllers
317 Convection-Enhanced Pirani Vacuum Sensors (1.0x10-3 to 1000 Torr)
345 Pirani Vacuum Sensors (1.0x10-4 to 100 Torr)
356 Micro-Ion® Plus Modules
385 Convectron® ATM Module
903 Inverted Magnetron Cold Cathode Vacuum Transducer (3.0x10-10 to 5.0x10-3 Torr)
905 MicroPirani™ Ultra Compact, OEM Vacuum Sensor Kit (1.0x10-5 Torr to Atmosphere)
909AR Digital and Analog Hot Cathode Vacuum Transducer (5.0x10-10 to 5.0x10-2 Torr)
943 Cold Cathode Vacuum Gauge Controller for use with 423 i-Mag® and 421 Vacuum Sensors
945 Pirani Vacuum Gauge Controller for use with 345 Vacuum Sensors
947 Convection-Enhanced Pirani Vacuum Gauge Controller for use with 317 Vacuum Sensors
979B Atmosphere to Vacuum Transducer (5.0x10-10 Torr to atmosphere)
999 Quattro Multi-Sensor Vacuum Transducer ( 5.0x10-10 Torr to atmosphere) with Atmospheric Switching
Mini Ion Gauge (MIG), Hot Cathode Ionization Vacuum Sensor, (5.0x10-10 to 1.0x10-2 Torr)
Nude Hot Cathode Ionization Vacuum Sensor (5.0x10-10 to 1.0x10-2 Torr)

Literature:

MKS, Granville-Phillips® interactive product selection guide

 

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, Granville-Phillips® Division, or call 303-652-4400.