FTIR, NDIR Infrared Gas Analysis Instruments
FTIR (Fourier Transform Infrared) and NDIR (Nondispersive Infrared) real-time and in-line gas analysis Instruments from MKS Instruments are capable of ppb to ppm sensitivity for multiple gas species including NF3, NH3, H2, NO and N2O and gases with as much as 30% water.