MKS Announces New Programmable Safety Software

Enables faster time to market for safety critical equipment

Andover, Mass., January 25, 2024 -- MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of enabling technologies that transform our world, today announced it received TÜV Rheinland certification for its new programmable safety interlock solution for our custom I/O control platform.

MKS’ TÜV certified programmable safety software, when combined with a custom I/O controller, provides users with the ability to create interlock logic across multiple distributed controllers, increasing design flexibility and ensuring high level safety. Users have access to an easy-to-use GUI interface to make safety interlock modifications on-the-fly without changing hardware, shortening the update cycle, and eliminating the logistical costs of managing excess and obsolete material. The safety interlock logic meets industry standards and safety requirements in compliance with Cat. 4 / PL e acc. to EN ISO 13849-1, SIL 3 acc. to IEC 61508 and functions independently from communication with other systems and networks.

“Earning this certification from TÜV ensures our product offering provides our customers with a flexible solution that meets the highest safety level requirements.“ said Tony Owen, Vice President and General Manager of Controls, Plasma and Reactive Gas. “Adding programmable safety to our portfolio demonstrates our commitment to provide solutions that can save time in engineering design phases and reduce the cost of iterations.”

The Programmable Safety Software is used in Semiconductor Wafer Fabrication, Solar, and Industrial machinery applications. Learn more about the product here.


About MKS Instruments
MKS Instruments enables technologies that transform our world. We deliver foundational technology solutions to leading edge semiconductor manufacturing, electronics and packaging, and specialty industrial applications. We apply our broad science and engineering capabilities to create instruments, subsystems, systems, process control solutions and specialty chemicals technology that improve process performance, optimize productivity and enable unique innovations for many of the world’s leading technology and industrial companies. Our solutions are critical to addressing the challenges of miniaturization and complexity in advanced device manufacturing by enabling increased power, speed, feature enhancement, and optimized connectivity. Our solutions are also critical to addressing ever-increasing performance requirements across a wide array of specialty industrial applications. Additional information can be found at www.mks.com.

MKS Contact:
Bill Casey
Senior Director - Marketing Communications
+1 630.995.6384
bill.casey@mksinst.com