Vacuum Baseline Monitor, Process Tools, Vision 2000-B™ RGA
Model: VISION-2000-B
Vacuum Baseline Monitor, Process Tools, Vision 2000-B™ RGA
Vacuum Baseline Monitor, Process Tools, Vision 2000-B™ RGA
Model: VISION-2000-B
Overview
Overview
The Vision 2000-B™ Baseline Monitor Residual Gas Analyzer tracks levels of potentially damaging residual gases that negatively impact the quality. It features "smart head" technology with an electronics unit that mounts directly onto the analyzer head, and connects to the system PC via Ethernet. Vision 2000-B™ is an application-specific instrument that monitors vacuum pumpdown, baseline, and leakback conditions on semiconductor and thin film process tools, and alerting to conditions that impact yield.
Technical Specs
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Mass Range1-100, 1-200, or 1-300 amu
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Ion SourceOpen ion source
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FilamentsTwin Tungsten or Thoria filaments
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Mass FilterDouble filter (1 in. "RF only" pre-filter with 4 in. main filter)
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DetectorDual (Faraday and secondary electron multiplier)
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Maximum Analyzer Operating Pressure7.6e-5 Torr (1e-4 mbar)
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Minimum Detectable Partial PressureFaraday: 2e-11 Torr (2.7e-11 mbar), Secondary electron multiplier: 5e-14 Torr (6.7e-14 mbar)
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Mass StabilityBetter than ±0.1 amu over 8 hours
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ResolutionBetter than 10% valley for peaks of equal height across mass range
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Mounting FlangeDN35CF (70 mm/2.75 in. OD) Conflat
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Vacuum HardwareAnalyzer housing plus pneumatic isolation valve. Optional independent total pressure gauge and/or valve and filament trip-box assemblies available for interlocked protection of the RGA.
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Bake Out Temperature200°C with Bakeout Jacket
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Pneumatics60-80 psig CDA
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Electronics Weight on Flange1.7 kg
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Power Requirements24 VDC, 3.4A, external supply (included), 100-120V/200-240V, 2.1 Amp, 47-63 Hz
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Maximum Operating ConditionsElectronics: 10 - 40°C, 80% RH (non condensing)
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LED Status IndicationInterlock status, emission OK, SEM, power and communications
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I/O Capability4 analog inputs (-11 to +11 v, 22 bit), 2 analog outputs (0-10 V, 12 bit), 16 digital TTL I/O, 1 opto-isolated filament control input, one dedicated gauge port, Optional PC-based Generic I/O support for PCI slots, USB and Ethernet I/O devices. Modbus/GEM SECS support for some product configurations.
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Other FacilitiesLeak check headset socket, external filament trip socket, instrument reset
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SoftwareProcess Eye Professional fully network compatible control platform generating under Microsoft Windows 2000, XP or Vista
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CommunicationEthernet CAT-5e
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PC RequirementsIntel Pentium IV or AMD Athlon XP 1.2 GHz, 1024 MB RAM, 120 GB disk free space drive. Multi-sensor installation may require higher specifications.
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Simultaneous Multi-SensorProcess Eye Professional client/server configuration offers flexible multi-sensor operation.
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Shipping Weight25 lbs (11.4 kg)
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TypeResidual Gas Analyzer
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Measurement TechniqueMass Spectrometry
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ComplianceCompliant to RoHS Directive 2002/95/EC (control unit)
Resources & Downloads
Drawings & CADs
- Vision 1000-B RGA Dimensional Drawing (82.9 kB, PDF)
Vacuum Baseline Monitor, Process Tools, Vision 2000-B™ RGA
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