Process Sense™ NDIR
Specifications
More about the Process Sense™ NDIR Analyzer here
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Process Sense™
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Dimensions
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127 mm W x 165 mm L x 269 mm D
(5.0" W x 6.5" L x 10.6" H)
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Weight
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7 lbs.
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Response Time
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Continuous analog response with 50 msec update
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Signal Level
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0-10 VDC
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Calibration Accuracy
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±10%
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Detection Limit
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1 mTorr partial pressure of SiF4
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Baseline Fluctuation
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≤5 mV for the duration of a typical clean
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Infrared Source
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Resistively heated silicon carbide element
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Analysis Method
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Filter based NDIR
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Vacuum Cell
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Stainless steel flow-through vacuum cross
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Vacuum Fittings
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NW-40-KF fittings standard
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Vacuum Cell Optical Pathlength
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85 mm long by 17.8 mm diameter beam path
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Vacuum Cell Windows
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BaF2 windows 25.2 mm diameter x 5.0 mm thick
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Infrared Detector
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Temperature compensated LiTaO3
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Power Requirements
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+15 VDC (110 mA), -15 VDC (30 mA), +24 VDC (1 A nominal - 2 A initial)
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Analog Output Signals
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Single-ended referenced to ±15 VDC supply common
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Digital Input/Output Signals
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Isolated DI/DO designed for 24 VDC operation
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Specifications are subject to change without notice.
Copyright MKS Instruments, Inc. unless noted otherwise.
© 2010 by MKS Instruments