Specifications
Microvision 2 Residual Gas Analyzer (RGA)
More about the Microvision 2
here
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Microvision 2 Electronics
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Mounted weight on flange |
1.7kg
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Power |
24V DC, 3A external universal voltage supply (included)
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Maximum Operating Conditions |
Electronics: 40°C, 80% RH (non condensing)
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Communication |
10/100 Base-T Ethernet, static or automatically assigned IP addresses
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Data Acquisition Method |
Dedicated real time acquisition processor
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Data Collection Methods |
- Analog scanning, full mass range 8, 16 or 32 points/amu
- Barchart scanning
- Peak-jump collection of up to 15 peaks per scan
- Complete recipe control to link multiple acquisition into a single scan
(Process
Eye Professional and TOOLweb RGA only)
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Number of Stored Source Settings |
- 6 sets including ion source parameters, alignment, resolution, detector
calibrations
- Stored in electronics and recalled by EasyView, Process Eye Professional or TOOLweb
RGA
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Software Controlled Tuning Parameters |
- Electron energy, 20 to 100eV
- Emission current, 0 to 2 mA (5 mA degas)
- Ion energy, 0 to 10V
- Ion extraction, 0 to -130V
- Filter pole bias, 0 to -10V to +10V
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Multiplier Protection |
Automatic removal of over-range peaks from all scan modes, dedicated multiplier inhibit line for over temperature
or over-pressure and X-trip fi lament and multiplier protect for over-pressure
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Data Acquisition Speed |
<3ms per point for analog scanning
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Settling Time to 1 ppm of Maximum Signal |
<20ms
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Control Method |
CE operating system processor with web-server interface
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Command Structure |
Documented ASCII command protocols
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Software |
- Built-in web applications allowing RGA control and data acquisition using a platform
independent web browser without the need for dedicated installed software
- EasyView, Process Eye Professional and TOOLweb RGA Windows software packages for
Windows 2000, XP, or Vista
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Interfaces |
- RJ45 socket: 10/100 Base-T Ethernet
- 25 way D-type female: 16 confi gurable TTL I/O, one dedicated multiplier over
temperature
inhibit input, includes power for ±15V (100mA), +24V (100mA) and ±3.3V (100mA)
- 15 way D-type female: 4 analog in (-11V to +11V 22bit), 2 analog outputs (0-10V
12bit),
includes power for ±15V (100mA), compound output from detector pre-amplifi er
- 9 way D-type female dedicated vacuum gauge port: -11 to +11V 22bit analog input, 1
digital
input (gauge OK), 1 digital output (gauge enable) and gauge power +24V (100mA)
- 3.5mm jack socket: Opto-isolated input for fi lament protect or control with auto
detection of
presence of the jack plug as failsafe
- 2.5mm jack socket: Audio output for use with speaker and wired or wireless
headphones
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Microvision 2 Analyzers
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Double (standard configuration)
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5" Single
| Triple
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| Ranges, amu
| 100, 200, 300
| 100, 200
| 100, 200, 300
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| Max. operating pressure
| 7.6e-5 Torr (1e-4 mbar)
| 7.6e-5 Torr (1e-4 mbar)
| 7.6e-5 Torr (1e-4 mbar)
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| Ion source sensitivity
| 2e-4 A/mbar
| 2e-4 A/mbar
| 2e-4 A/mbar
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| Min. detectable partial pressure, open ion
source
| 3 standard deviations of baseline noise at 300ms integration
| 3 standard deviations of baseline noise at 300ms integration
| 3 standard deviations of baseline noise at 300ms integration
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| Faraday
| 1.5e-11 Torr (2e-11 mbar)
| 1.5e-11 Torr (2e-11 mbar)
| 1.5e-11 Torr (2e-11 mbar)
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| Microchannel plate
| 3.8e-14 Torr (5e-14 mbar)
| 3.8e-14 Torr (5e-14 mbar)
| 3.8e-14 Torr (5e-14 mbar)
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| Single channel EM
| n/a
| n/a
| 7.6e-15 Torr (1e-14 mbar)
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| Bake out temperature
| 250°C (with extender or electronics removed)
| 250°C (with extender or electronics removed)
| 250°C (with extender or electronics removed)
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| Operating temperature
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- 200°C (Faraday only with electronics at <40°C)
- 150°C (multiplier detection with electronics <40°C and pressure <1e-8
mbar)
- 90°C (multiplier detection with electronics <40°C and pressure <1e-5
mbar)
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- 200°C (Faraday only with electronics at <40°C)
- 150°C (multiplier detection with electronics <40°C and pressure <1e-8
mbar)
- 90°C (multiplier detection with electronics <40°C and pressure <1e-5
mbar)
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- 200°C (Faraday only with electronics at <40°C)
- 150°C (multiplier detection with electronics <40°C and pressure <1e-8
mbar)
- 90°C (multiplier detection with electronics <40°C and pressure <1e-5
mbar)
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| Filament materials
| Tungsten or Thoria coated Iridium
| Tungsten or Thoria coated Iridium
| Tungsten or Thoria coated Iridium
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| UHV ion source
| Option
| Standard
| Option
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| UHV out-gassing rate
| <1e-9 mbar -l/s
| <1e-9 mbar -l/s
| <1e-9 mbar -l/s
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| PVD ion source
| Option
| n/a
| Option
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| Cross beam ion source
| Option
| n/a
| Option
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| Resolution
| Better than 10% valley for peaks of equal height across mass range
| Better than 10% valley for peaks of equal height across mass range
| Better than 10% valley for peaks of equal height across mass range
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| Peak position drift
| ±0.1 amu over 8 hours at stable flange temperature
| ±0.1 amu over 8 hours at stable flange temperature
| ±0.1 amu over 8 hours at stable flange temperature
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| Zero blast effect at mass 2 (closed ion
source)
| <5 ppm baseline levels next to mass 2
| n/a
| <5 ppm baseline levels next to mass 2
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| Flange fitting
| DN 40 CF-F
| DN 40 CF-F
| DN 40 CF-F
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Specifications are subject to change without notice.
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