Manuals

Automation & Control

Control System Discontinued Product manual archive

Automation & Control Software

Controls Workbench Software Version 2.7 manual
Controls Workbench Software Version 2.8 manual
Ethernet Control Module(ECM)/Programmable Interlock manual
Senselink ™ Data Gateway & Monitor 1 manual
Senselink ™ Data Gateway & Monitor 2 manual
SenseLink™ QM 2.2.6 manual
SenseLink™ QM 2.4 manual
SenseLink™ QM 3.1 manual
Visim Logic creation in MS-Visio user guide

CompactPCI (cPCI) Cards & Cages

AIAO-0700 manual
DIDO-0710 manual
PWRS-0720 manual
SCOM manual

DeviceNet™ I/O Control Devices

MacroNode™ cLogic API
MacroNode™ manual
Micronode™ DeviceNet AI manual
Micronode™ DeviceNet Combo manual
Micronode™ DeviceNet DIDO manual
Micronode™ Ethernet Combo manual
Micronode™ Ethernet DIDO manual
Micronode™ Profibus Combo manual

Ethernet I/O Control Devices

MacroNode™ cLogic API
MacroNode™ manual
Remote Monitoring Unit (RMU) with SenseLink™ End-Point Control Interface manual addendum
RMU manual
RMU 2 manual

Gateways

AS01366 DeviceNet™ Gateway manual
AS02366 manual
CDN366 DeviceNet specifications
CDN366 manual
CDN367 DeviceNet specifications
CDN367 manual
PFB366 manual
PFB366 Profibus specifications
ToolLink™ CDN466 Gateway manual
ToolLink™ CDN466-5 Gateway manual

Programmable Automation Controllers

ECM manual
ECM Programmable Interlock manual
ECM2 AS01022G-01 manual
ECM2 AS01023G-01 manual
PAC 100 manual
PAC 1000 manual appendices
PAC 1000 manual
Remote Monitoring Unit (RMU) with SenseLink™ End-Point Control Interface manual addendum
RMU manual
RMU 2 manual

Temperature Controllers

MultiTherm 1000 manual
MultiTherm™ 2000 manual

Flow/Gas Delivery

Flow Measurement & Control Discontinued Product manual archive

Compact, General Purpose Thermal Mass Flow Controllers

MF1 MFC manual

Flow Product Power Supplies, Readouts, & Accessories

246C manual
247D manual
PR4000B-F manual
PR4000B-S manual

G-Series Thermal Mass Flow Controllers and Meters with Fast & Repeatable Performance

G-Series Mass Flow Controller DeviceNet™ manual supplement
G-Series Mass Flow Controller Profibus manual supplement
G-Series Mass Flow Controller RS485 manual supplement
G-Series MFC manual

High-flow Thermal Mass Flow Controllers & Meters

1579A/B manual
579A/B manual

In Situ Flow Verifiers

Tru-Flo® manual

Legacy Mass Flow Controllers & Meters

1179A manual
1179B manual
179A manual
179B manual
ALTA MC20 analog manual
ALTA MC20 DeviceNet™ manual
Mass-Flo® DeviceNet™ Firmware 1.0x manual
Mass-Flo® DeviceNet™ Firmware 2.0x manual
Mass-Flo® DeviceNet™ Firmware SP040-98 manual

P-Series High Performance Multi-gas, Multi-range Thermal Mass Flow Controllers

P2A MFC manual
P4B manual
P9B manual

Thermal & Pressure-based Mass Flow Controllers for Special Applications

1150C manual
1152C manual
1640A manual

Heaters, Traps & Effluent Management

Heater Jacket Discontinued Product manual archive

Adjustable Set Point, 120VAC Heater Jackets

Series 48 Vacuum Component Heater manual

Adjustable Set Point, 240 VAC Heater Jackets

Series 48 Vacuum Component Heater manual

Filter Housing Heater Jackets

Series 48 Filter Housing Heaters manual

Process Traps

Vapor Sublimation Trap manual

Series 48 Adjustable Set Point Vacuum Component Heater Jackets

Series 48 Vacuum Component Heater manual

Microwave

Alter® CM & CR Series Compact Microwave Power Supplies for 2450 MHz Magnetrons

CM 330 manual

Alter® SM Series Switch Mode Microwave Power Supplies, for 2450 MHz Magnetrons

SM 1250 manual
SM 1280 manual
SM 1690 manual
SM 845 manual
SM445 manual

Microwave Components

Alter® Products manual archive

Microwave Generators

SG 524 manual

Microwave Magnetron Heads

TM 060 manual
TM0/TMA manual
TXA, TX0 series manual

Power

13.56MHz RF Plasma Generators

elite™ 600/300 half rack manual
elite™ 750/600/300 full rack manual

Pressure/Vacuum Measurement

Baratron® Pressure Measurement Discontinued Product manual archive
Granville-Phillips® & HPS® Vacuum Sensor Discontinued Product manual archive

Ambient Temperature Operation (Direct, Absolute, Pressure/Vacuum Switches)

141A manual
41A manual
41B manual
42A manual
42B manual
51A manual
51B manual
52A manual
52B manual

Ambient Temperature Operation (Direct, Absolute & Gauge, Analog Pressure/Vacuum Measurement)

230E manual (118989-P1)
622C manual (1073269-001)
623B manual (1073269-001)
626C manual (1073269-001)
722A manual
722B manual (1034138-001)
740b manual
740C manual (1034255-001)
750B manual
750C manual (1034255-001)
870B/872B manual
R740B/R750B manual
R740C manual (1034255-001)
R750C manual (1034255-001)

Ambient Temperature Operation (Direct, Differential Pressure/Vacuum Measurement)

221B manual
226A & 228A manual (1028109-001)

Cables, Parts & Accessories for Vacuum Gauge Controllers, Sensors & Transducers

900 Series Transducer USB Adapter manual

Controllers for Vacuum Gauges & Transducers

Archive of manuals for older Granville-Phillips® products
307 Vacuum Gauge Controller Instruction Manual, Three process control relays on Ion Gauge, option 307267 manual (307268)
307 Vacuum Measurement Controller manual(307024)
350 UHV Gauge Controller manual (350010)
358 Micro-Ion Vacuum Gauge Controller manual (358013)
358 Process Control Module 358039 with Assignable Gauges manual (017653)
358 Process Control Module with Assignable Gauges 017967 manual (017967)
370 Stabil-Ion Controller Vacuum Measurement System Manual manual (370119)
370 Stabil-Ion® Gauge Controller with RS-485 Interface Option manual (016482)
370 Stabil-Ion® Gauge Installed Internal to Vacuum Chamber manual (016552)
475 Convectron® Vacuum Gauge Controller manual (475101)
937B Gauge Controller manual
PDR900-12 manual

Digital Communications (Direct, Absolute Pressure/Vacuum Measurement)

627C e-Baratron® manual (1004661-001)
628C e-Baratron® manual (1004661-001)
E27C e-Baratron® manual (1004661-001)
E28C e-Baratron® manual (1004661-001)

Heated Analog Capacitance Manometers (Direct, Absolute, Analog Pressure/Vacuum Measurement)

624B, 625B manual (128035-P1)
624D, 625D manual (1034178-001)
625 manual
627F manual (1073260-001)
628F manual (1073261-001)
629 manual
631B manual
631C manual
631D manual (1039281-001)
727A manual
728A manual
a-Baratron® manual
E27F manual (1073262-001)
E28F manual (1073263-001)
E29 manual

Heated, Dual-range Capacitance Manometers (Absolute Analog Pressure/Vacuum Measurement)

D24 manual
D25 manual
D27 manual
D28 manual

High Accuracy, Wide Range Systems (Direct, Absolute, Analog Pressure/Vacuum Measurement)

120A manual (112228-P1)
615A manual
690A manual

High Accuracy, Wide Range Systems (Direct, Differential Pressure/Vacuum Measurement)

120A manual (112228-P1)
616A manual
698A manual

Legacy Indirect Vacuum Gauges & Controllers

316 Convectron Vacuum Measurement Controller manual(316005)
316 Vacuum Gauge Controller, operates 6 Convectron Gauges manual (316059)
356 Micro-Ion® Plus Gauge Removal and Replacement proceedure (356028)
356 Micro-Ion® Plus Module Operating Instructions Instruction Manual 356007: 356032–##–# or 356033–##–# manual (017784)
356 Micro-Ion® Plus Module With DeviceNet™ Protocol manual (356010)
356 Micro-Ion® Plus Vacuum Gauge Module manual (356007)
385 Convectron ATM Module with DeviceNet Output manual (385008)
385 Convectron ATM Module, Analog and RS-485 manual (385004)
385 Mini-Convectron® ATM Gauge Removal and Replacement Procedure manual (385005)
385 Mini-Convectron® Vacuum Gauge Modules with Nonlinear Analog Output and Process Control Relays quick start guide
903 Inverted Magnetron manual
909AR manual
943 Vacuum Gauge Controller manual
945 Vacuum Gauge Controller manual
947 Vacuum Gauge Controller manual
979B ATV manual
999 Quattro manual

NEMA Compliant (Direct, Absolute, Analog Pressure/Vacuum Measurement)

220DA manual
430E manual

NEMA1 Compliant (Direct, Differential Pressure/Vacuum Measurement)

220DD manual

Power Supplies, Readouts, and Accessories for Baratron® Pressure/Vacuum Measurement Products

226A manual
631C manual
660B manual
670B manual
727A/728A manual
740C/750C manual
870B/872B manual
LDM manual
LDM Local Display Module manual
PDR2000 manual
PR4000B-F manual
PR4000B-S manual

Temperature Controlled to 100 degrees C (Direct, Absolute, Pressure/Vacuum Switches)

142A manual

Vacuum Gauge Calibration Equipment

SRG-3 Spinning Rotor Vacuum Gauge System manual
SRG-3 Spinning Rotor Vacuum Gauge System RS 232 manual

Vacuum Gauge Transducers & Modules

Archive of manuals for older Granville-Phillips® products
275 Gauge Cable Connector manual (030236)
275 Mini-Convectron® Module DeviceNet™ manual (275563)
275 Mini-Convectron® Module DeviceNet™ quick start guide (275001)
275 Mini-Convectron® Module w/ Nonlinear Analog Outputs & Process Control manual (275512)
275 Mini-Convectron® Module w/Nonlinear Analog Outputs & Process Control (metal enclosure) quick start guide (275002)
275 Mini-Convectron® Module w/Nonlinear Analog Outputs & Process Control (plastic enclosure) quick start guide (275008)
275 Mini-Convectron® Module with Analog Output, Dual-Process Relays, and Plastic Enclosure manual addendum (275836)
275 Mini-Convectron® Module with Differential Output Amplifier manual (275831)
275 Mini-Convectron® Module with Digital Display, Platinum Sensor, Plastic Enclosure manual addendum (275892)
275 Mini-Convectron® Module with RS-485 and Dual Process Relays Instruction manual(275545)
275 Mini-Convectron® Module with RS-485 Interface manual (275955)
275 Mini-Convectron® Vacuum Gauge Module with DeviceNet™ Digital Interface manual (275563)
275 Mini-Convectron® Vacuum Gauge Module with Linear Analog Output manual (275539)
275 Mini-Convectron® Vacuum Gauge Module with RS-485 quick start guide (275007)
275 Mini-Convectron® Vacuum Gauge Module with RS-485 and Process Control Relays quick start guide (275003)
347 Stabil-Ion® Module (Analog ) Instruction manual(347011)
354 Gauge Baffle: Installation of Gauge Baffle into System Port manual (017638)
354 Micro-Ion Gauge Installation and Operating Instructions Addendum for 354069–TD manual (354072)
354 Micro-Ion Gauge Removal and Installation Instructions for 354076–TE, 354076-TD, 354076-TK manual (017928)
354 Micro-Ion Gauge Removal and Installation Instructions for 354078–TK manual (017929)
354 Micro-Ion Module 354064 with RJ45 I/O manual (017398)
354 Micro-Ion Module Extended Gauge Tube with Baffle, 354075–TD-T, 354075–TE-T, and 354075–TK-T manual (017930)
354 Micro-Ion Module Extended Gauge Tube without Baffle, 354077–TK-T manual (017931)
354 Micro-Ion Vacuum Gauge Module (with DeviceNet Digital Interface), Mini-Convectron and Micro-Ion Vacuum Gauge Module Devicenet programming guide (014645)
354 Micro-Ion® Gauge Baffle Installation manual (015029)
354 Micro-Ion® Module quick start guide (354079)
354 Micro-Ion® Module for 354073-TD-T manual (017911)
354 Micro-Ion® Module Gauge Replacement instructions (354012)
354 Micro-Ion® Vacuum Gauge Module with Analog Output manual (354004)
354 Micro-Ion® Vacuum Gauge Module with DeviceNet™ manual (354020)
354 Micro-Ion® Vacuum Gauge Module with RS-485 Digital Interface manual (354008)
354083 Module Measurement Correction Factor programming guide (185516)
390 Micro-Ion Gauge, 390531 Series w/ Filament Status Output manual (170196)
390 Micro-Ion® ATM Four-Sensor Combination Vacuum Gauge with RS-485 Interface and Analog Output manual (390001)
390 Micro-Ion® ATM Gauge Removal and Replacement proceedure (390400)
390 Micro-Ion® ATM Module Instruction Manual 390412-#-##-# manual (390007)
392 Micro-Ion® Plus Gauge Removal and Replacement proceedure (392400)
392 Micro-Ion® Plus Two-Sensor Combination Vacuum Gauge with DeviceNet™ and RS-485 Interface, and Analog Output manual (392002)
392 Micro-Ion® Plus Two-Sensor Combination Vacuum Gauge with RS-485 Interface and Analog Output manual (392001)
500 Series Cold Cathode Gauge Modules manual (500001)
500 Series Cold Cathode Gauge Modules quick start guide (500002)
901P MicroPirani/Piezo manual (Revision J)
901P MicroPirani/Piezo Standard Version setup instructions
902B Absolute Piezo Vacuum Transducer manual (Revision C)
905 MicroPirani™ Sensor Kit manual
910 DualTrans™ MicroPirani™/Absolute Piezo manual (Revision F)
925 MicroPirani manual (Revision I)
925 MicroPirani Standard Version setup instructions
971B UniMag™ manual (Revision H)
972B DualMag™ manual (Revisioin I)
974B QuadMag™ manual (Revision H)
Granville-Phillips® Convectron® Vacuum Gauge Bridge Amp PC Board with Analog Output Signal manual (275331)
Micro-Ion® Module Extended Gauge Tube without Baffle, 354077–TD-T manual (229204)
Quick Start Guide for the Granville-Phillips® Series 275 Mini-Convectron® Vacuum Gauge Modules with Linear Analog Output manual (275004)
Removal and Installation Instructions for Micro-Ion® Gauge Catalog #354078–TD manual (229201)

Vacuum Gauges

Archive of manuals for older Granville-Phillips® products
274 Bayard-Alpert Type Ionization Gauges manual (274026)
274 Gauge Radiation Baffle Installation manual (016117)
355 Micro-Ion® Gauge Instruction manual (355004)
355 Micro-Ion® Gauge Instruction quick start guide (013606)
370 Stabil-Ion Controller Vacuum Measurement System manual (370119)
370 Stabil-Ion® Gauge Controller with RS-485 Interface Option manual (016482)
370 Stabil-Ion® Gauge Installed Internal to Vacuum Chamber manual (016552)
423 I-Mag® manual

Vacuum Quality Monitor (VQM®) Systems

830 to 835 VQM upgrade guide (190932)
830/835 VQM Filament Replacement manual (830233)
835 Electron Multiplier Replacement manual (835006)
835 Software release notes (190003)
835 VQM manual (835000)
835 VQM programming guide (835003)
835 VQM quick start guide (835001)
835 VQM Differential Pumping System manual (835007)
835 VQM® System Longer than 3 meter MS Controller-to-Gauge Interconnect Cable Optimization manual (835002)

Valve Solutions & Pressure Controllers

Downstream Valves and Pressure Controllers

153D manual
153E manual
153F manual
1651C manual
253B manual
651C manual
653B manual
T3B/T3P Valve DeviceNet™ Interface supplemental manual
T3B/T3P Valve RS-232 Interface supplemental manual
T3Bi Valve Analog/TTL manual
T3Bi Valve DeviceNet™ manual
T3Bi Valve RS-232 manual

Upstream Valves and Pressure Controllers

148J manual
244E Pressure/Flow Controller & 245 Control Valve manual
248 A,B,C manual
250E manual
640A/641A manual
640B/641B manual
640V/641B manual
649A manual
649B manual
Granville-Phillips® Series 245 Pressure/Flow Control Valve Assembly manual
Granville-Phillips® Series 245 Pressure/Flow Control Valve Assembly quick start guide

Vacuum Isolation Valves

145 Vacuum Sentry® manual
150/160 & V-100 Valve manual
CRV Corrosion & Ozone Resistant Valve manual
CV™ Valve assembly instructions
ECv Compact Electric Vacuum Valve manual
High Cycle Valve (HCV) manual
Integrated LoPro™ Valve manual
Jalapeño Valve manual supplement
Jalapeño Heated Valve manual supplement
LoPro™ manual

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