DataSheets

Automation & Control

MKS Control and Information Technology product overview

Automation & Control Software

Senselink ™ Data Gateway & Monitor data sheet
SenseLink™ QM data sheet

Automation Platforms

MKS Automation Platform data sheet

CompactPCI (cPCI) Cards & Cages

AIAO-0700 data sheet
CDCG-0760 data sheet
DIDO-0710 data sheet
PWRS-0720 data sheet
SCOM 3U data sheet
SCOM 6U data sheet

DeviceNet™ I/O Control Devices

MacroNode™ data sheet
Micronode™ data sheet

Ethernet I/O Control Devices

MacroNode™ data sheet
RMU data sheet

Gateways

AS01366 data sheet
AS01367 data sheet
AS02366 data sheet
CDN366 data sheet
CDN367 data sheet
PFB366 data sheet
ToolLink™ data sheet

Programmable Automation Controllers

ECM data sheet
ECM2 data sheet
MKS Automation Platform data sheet
RMU data sheet

Temperature Controllers

MultiTherm 1000 data sheet
MultiTherm™ 2000 data sheet

Custom Vacuum Solutions

MKS Process Solutions brochure

Flow/Gas Delivery

MKS Instruments Flow Measurement & Control Product Line

Compact, General Purpose Thermal Mass Flow Controllers

MF1 data sheet

Flow Product Power Supplies, Readouts, & Accessories

MKS Mass Flow Control Accessories data sheet
MKS Mass Flow Control Power Supplies and Readouts data sheet
PR4000B data sheet
Test Diagnostic Board data sheet

Flow Ratio Controllers

DELTA IV data sheet
DELTA™ II "Stretch Body" data sheet
DELTA™II data sheet
DELTA™III data sheet

G-Series Thermal Mass Flow Controllers and Meters with Fast & Repeatable Performance

GE250A data sheet
GE50A data sheet
GM100A data sheet
GM50A data sheet
GM51A data sheet
GV50A data sheet

High-flow Thermal Mass Flow Controllers & Meters

1579/579 data sheet
MKS Instruments Flow Measurement & Control Product Line
MKS Mass Flow Control Power Supplies & Readouts data sheet
MKS Mass Flow Control Power Supplies and Readouts data sheet

I-Series IP66-rated Thermal Mass Flow Controllers & Meters

IE1000A data sheet
IE250A data sheet
IE500A data sheet
IE50A data sheet
IM250 data sheet
IM50A data sheet

In Situ Flow Verifiers

HA-MFV, High Accuracy Mass Flow Verifier data sheet
Tru-Flo® data sheet

Legacy Mass Flow Controllers & Meters

1179A data sheet
179A data sheet
ALTA MC20 data sheet

P-Series High Performance Multi-gas, Multi-range Thermal Mass Flow Controllers

P250A data sheet
P2A Low Pressure data sheet
P4B MFC data sheet
P9B data sheet

Thermal & Pressure-based Mass Flow Controllers & Meters

MKS Instruments Flow Measurement & Control Product Line
MKS Mass Flow Control Power Supplies & Readouts data sheet

Thermal & Pressure-based Mass Flow Controllers for Special Applications

1150C Heated Pressure-Based MFC data sheet
1152C data sheet
1640A data sheet
Design Request Sheet (.DOCX format)
Design Request Sheet (.PDF format)

Heaters, Traps & Effluent Management

MKS Process Solutions brochure

Adjustable Set Point, 120VAC Heater Jackets

Series 48 catalog

Adjustable Set Point, 240 VAC Heater Jackets

Series 48 catalog

Filter Housing Heater Jackets

Series 48 Filter Housing Heaters data sheet
Series 48 Heaters for Single-Use Filters data sheet

Nitrogen Barrier & Scrubber Inlet Transition Devices

Virtual Wall™ for Scrubber Inlets data sheet
Virtual Wall™ for TEOS data sheet

Process Traps

Metal Etch Trap data sheet
Teos Trap data sheet
Vapor Sublimation Trap data sheet

Series 48 Adjustable Set Point Vacuum Component Heater Jackets

Series 48 catalog

Series 49 Thermal Management System

Series 49 data sheet

Mass Spectrometry Solutions

MKS Instruments Mass Spectrometry Solutions product overview
Residual Gas Analysis/Mass Spectrometry literature archive

Atmospheric Pressure Gas Analysis Systems

Cirrus™ 3-XD data sheet
Cirrus™2 data sheet

Residual Gas Analyzers (RGA)

e-Vision 2 data sheet
HPQ3/HPQ3S data sheet
Microvision 2 data sheet

RGA Process and Chamber Environment Hardware and Software Monitors

300mm Resist-Torr data sheet

RGA Vacuum Process Monitors

HPQ3/HPQ3S data sheet
Vision 2000-B™ data sheet
Vision 2000-C™/Vision 2000-E™ data sheet
Vision 2000-P™ data sheet

Microwave

Alter® CM & CR Series Compact Microwave Power Supplies for 2450 MHz Magnetrons

CM 330 data sheet
CM 340/CM 440 data sheet
CM130 data sheet
CR 840 data sheet

Alter® MPS Series Industrial Switch Mode Microwave Power Supply Systems for 915 MHz Magnetrons

MPS Series data sheet

Alter® SM Series Switch Mode Microwave Power Supplies, for 2450 MHz Magnetrons

SM 1250 data sheet
SM 1280 data sheet
SM 1690 data sheet
SM 845 data sheet
SM445 data sheet

Integrated Microwave Plasma Subsystems

AX2600/AX2700 data sheet

Microwave Generators

AL20000 Series data sheet
GS Series data sheet
SG 524 data sheet
SmartPower® AX2500 Series data sheet

Microwave Magnetron Heads

Alter Microwave Magnetron Heads data sheet

Microwave Plasma Sources

ASTeX AX7610 data sheet

Microwave Power Supplies

SmartPower® AX2500 Series data sheet

Optical Gas Analyzers

Optical Gas Analysis Products from MKS

FTIR Analyzers

AIRGARD® CWA/TIC data sheet
AIRGARD® HPM/TIC data sheet
AIRGARD®Plus CWA/TIC data sheet
MGS300 System data sheet
MGS300-EP Eductor Pump
MGS300-HL Heated Line
MGS300-KIT data sheet
MGS300-SP Sample Probe
MKS Optical Gas Analysis Products
MultiGas™ 2030 data sheet
MultiGas™ 2030 1065-Ready data sheet
MultiGas™ 2030 1065-Ready HiSens data sheet
MultiGas™ 2030 CEM HiSens data sheet
MultiGas™ 2030 CEM-Cert data sheet
MultiGas™ 2030-HS data sheet
MultiGas™ CEM data sheet
MultiGas™ Purity Analyzer data sheet

MultiGas™ TFS™ Monitor

MultiGas™ TFS™ Monitor data sheet

NDIR Analyzers

Process Sense™ data sheet

Precisive® 5 Application-specific Analyzers

Precisive® 5-152 data sheet
Precisive® 5-154 data sheet
Precisive® 5-155 data sheet
Precisive® 5-159 data sheet
Precisive® 5-162 data sheet
Precisive® 5-242B data sheet
Precisive® 5-242B data sheet (Chinese)
Precisive® 5-253 data sheet
Precisive® 5-282 data sheet

Precisive® TFS™ Tunable Filter Spectroscopy

Precisive® 5 data sheet

Power

Power Solutions overview

13.56MHz RF Plasma Generators

elite™ data sheet
GHW Series data sheet

2MHz RF Plasma Generators

KEINOS data sheet
NOVA® data sheet

DC Power Generators

Power Solutions overview
RPDG-100 data sheet
RPDG-200 data sheet
RPDG-50 data sheet

Impedance Matching Networks

Power Solutions overview

RF Amplifiers for MRI

Power Solutions overview

RF Power Generators

Power Solutions overview

Pressure/Vacuum Measurement

MKS Instruments Pressure Measurement & Control Product Line

Absolute & Gauge Process Measurement (Direct Pressure/Vacuum Measurement)

Pressure Measurement & Control Product Line

Ambient Temperature Operation (Direct, Absolute, Pressure/Vacuum Switches)

141A data sheet
41B, 42B, 51B, 52B data sheet

Ambient Temperature Operation (Direct, Absolute & Gauge, Analog Pressure/Vacuum Measurement)

121A data sheet
121A manual (112722-P1)
230E data sheet
622C data sheet
623F data sheet
626C data sheet
722B data sheet
740C/750C data sheet
870B/872B data sheet
a-Baratron Unheated Manometer data sheet
AA07A/AA08A Micro-Baratron® data sheet
Baratron® Analog Capacitance Manometer selection guide
R740C/R750C data sheet

Ambient Temperature Operation (Direct, Differential Pressure/Vacuum Measurement)

221B data sheet
226A data sheet
228A data sheet

Analog Communications (Direct, Absolute & Gauge Pressure/Vacuum Measurement)

Baratron® Pressure Measurement Selection Guide
Baratron® Analog Capacitance Manometer selection guide
Pressure Measurement & Control Product Line

Baratron® Direct (Gas Independent) Pressure/Vacuum Capacitance Manometers (0.01-155,000 Torr)

Information Regarding Older Pressure Measurement Products
Pressure Measurement & Control Product Line

Controllers for Vacuum Gauges & Transducers

307 Bayard-Alpert Gauge Controller data sheet
358 Micro-Ion® Gauge Controller data sheet
370 Stabil-Ion® Gauge Controller data sheet
475 Convectron® Gauge Controller data sheet
937B Gauge Controller data sheet
946 Controller data sheet
MKS Vacuum Gauge, Controller, & Module product overview
PDR900 data sheet
UHV Gauging for High Energy Physics

Differential Process Measurement (Direct Pressure/Vacuum Measurement)

Pressure Measurement & Control Product Line

Digital Communications (Direct, Absolute Pressure/Vacuum Measurement)

627C e-Baratron® data sheet
628C e-Baratron® data sheet
e-Baratron® DA02A data sheet
E27C e-Baratron® data sheet
E28C e-Baratron® data sheet
i-Baratron DA01A data sheet
Pressure Measurement & Control Product Line

Granville-Phillips® Indirect Vacuum Gauges

MKS Vacuum Gauge, Controller, & Module product overview

Heated Analog Capacitance Manometers (Direct, Absolute, Analog Pressure/Vacuum Measurement)

624F data sheet
625F data sheet
627F data sheet
627F data sheet for Manometers with 24 VDC (20.0 – 31.5 VDC) and Profibus® Options
628F data sheet
628F data sheet for Manometers with 24 VDC (20.0 – 31.5 VDC) and Profibus® Options
629F data sheet
631D data sheet
727A data sheet
728A data sheet
a-Baratron® data sheet
Baratron® Analog Capacitance Manometer selection guide
CV7627D/CV7628D Baratron® Isolation System data sheet
E27F data sheet
E28F data sheet
E29F data sheet
Pressure Measurement & Control Product Line

Heated, Dual-range Capacitance Manometers (Absolute Analog Pressure/Vacuum Measurement)

Baratron® Analog Capacitance Manometer selection guide
D24F data sheet
D25F data sheet
D27F data sheet
D28F data sheet
Pressure Measurement & Control Product Line

High Accuracy, Wide Range Systems (Direct, Absolute, Analog Pressure/Vacuum Measurement)

120AA data sheet
690A data sheet

High Accuracy, Wide Range Systems (Direct, Differential Pressure/Vacuum Measurement)

120AD data sheet
698A data sheet

Installation Hardware for Vacuum Gauges and Sensors

Series 31 ISO-KF catalog
Series 88 CF catalog

Legacy Indirect Vacuum Gauges & Controllers

356 Micro-Ion® Plus Module data sheet
385 Convectron® ATM Module data sheet
903 Inverted Magnetron data sheet
943/423/421 data sheet
MKS Vacuum Gauge, Controller, & Module product overview

NEMA Compliant (Direct, Absolute, Analog Pressure/Vacuum Measurement)

220DA data sheet
430E data sheet

NEMA1 Compliant (Direct, Differential Pressure/Vacuum Measurement)

220DD data sheet

Power Supplies, Readouts, and Accessories for Baratron® Pressure/Vacuum Measurement Products

120AA data sheet
120AD data sheet
121A data sheet
121A manual
226A data sheet
4-20 mA Output Module data sheet
430E data sheet
670B data sheet
722B data sheet
727A/728A data sheet
LDM data sheet
LDM Local Display Module data sheet
MKS Instruments Pressure Measurement & Control Product Line
PDR2000 data sheet
PR4000B data sheet

Pressure/Vacuum Rate Calibrators

PBMS2 data sheet
PBTS1A data sheet
PVS6E data sheet

Relay Output (Vacuum/Pressure Switches)

Pressure Measurement & Control Product Line

Temperature Controlled to 100 degrees C (Direct, Absolute, Pressure/Vacuum Switches)

142A data sheet

Vacuum Gauge & Sensor Controller Cables, Parts & Accessories

307 Bayard-Alpert Gauge Controller data sheet
358 Micro-Ion® Gauge Controller data sheet
370 Stabil-Ion® Gauge Controller data sheet
475 Convectron® Gauge Controller data sheet
943/423/421 data sheet
946 data sheet
PDR900 data sheet

Vacuum Gauge and Sensor Cables & Parts

275 Mini-Convectron® Module data sheet
903 Inverted Magnetron data sheet
Series 970 data sheet
UHV Gauging for High Energy Physics

Vacuum Gauge Calibration Equipment

SRG-3 Spinning Rotor Vacuum Gauge System data sheet

Vacuum Gauge Transducers & Modules

275 Mini-Convectron® Module data sheet
347 Stabil-Ion® Module data sheet
354 Micro-Ion® Module data sheet
390 Micro-Ion® ATM Module data sheet
392 Micro-Ion® Plus ATM Module data sheet
523 data sheet
901P MicroPirani/Piezo data sheet
902B data sheet
905 MicroPirani™ Sensor Kit data sheet
910 DualTrans™ MicroPirani™/Absolute Piezo data sheet
925 MicroPirani data sheet
MKS Vacuum Gauge, Controller, & Module product overview
MKS Vacuum Gauge, Controller, & Module product overview
Series 500 Cold Cathode Gauge Module data sheet
Series 970 data sheet

Vacuum Gauges

274 Bayard-Alpert Type Ionization Gauges data sheet
275 Convectron® Pirani Vacuum Gauge data sheet
355 Micro-Ion® Gauge & 358 Micro-Ion Gauge Controller data sheet
370 Stabil-Ion® Bayard-Alpert Vacuum Gauge data sheet
937B Gauge Controller data sheet
943/423/421 data sheet
MKS Vacuum Gauge, Controller, & Module product overview

Vacuum Quality Monitor (VQM®) Systems

835 Vacuum Quality Monitor System data sheet
835 VQM Differential Pump System data sheet
MKS Vacuum Gauge, Controller, & Module product overview

Reactive Gas

Ozone Generation Products brochure

Accessories for Ozone Products

OVS data sheet
Static Mixer data sheet

Dissolved CO2

DI-SOLVER CO2 data sheet

Dissolved Ozone Delivery Systems

LIQUOZON® HeliO3 data sheet
LIQUOZON® PrimO3 data sheet
LIQUOZON® Single data sheet
LIQUOZON® Smart data sheet
LIQUOZON® Stream data sheet
LIQUOZON® VariO3 data sheet
Ozone Generation Products brochure

Ozone Gas Delivery Systems

O3MEGA® AX8561 data sheet
Ozone Generation Products brochure
SEMOZON® AX8550 data sheet
SEMOZON® AX8555 data sheet
SEMOZON® AX8560 data sheet
SEMOZON® AX8575 data sheet
SEMOZON® AX8585 data sheet

Ozone Gas Generators

AX8415 data sheet
Ozone Generation Products brochure
SEMOZON® AX8407 data sheet
SEMOZON® AX8407C data sheet
SEMOZON® AX8410 data sheet

Ozone Sanitization

EO3™ Ozone Sanitation Generator data sheet
LIQUOZON® Ultra data sheet
Ozone Generation Products brochure

Remote Plasma Sources

MKS Plasma Source Product Line

Downstream Plasma Sources

ASTeX AX7610 data sheet
AX7610 data sheet
Microwave Plasma Source data sheet
MKS Microwave Product Family

Plasma Sources for NF3 and Fluorine-based Gases

ASTRON® hf-s AX7645 data sheet
ASTRON® Paragon® AX7700/AX7710 data sheet
ASTRON®ex AX7685 data sheet
ASTRON®hf+ AX7635 data sheet
ASTRON®G7 AX7667 data sheet

Remote RF Plasma Sources

Paragon® H* AX7780/AX7785 data sheet
R*evolution® III AX7695 data sheet

Vacuum & Stainless Steel Components

MKS Process Solutions brochure

ButtWeld Vacuum Components & Fittings

Series 23 ButtWeld Component catalog

CF UHV Components & Fittings

Series 88 CF catalog

ISO-KF Vacuum Components & Fittings

Series 31 ISO-KF catalog

ISO-Universal Vacuum Components & Fittings

Series 76 ISO-Universal Component catalog

Valve Solutions & Pressure Controllers

Downstream Valves and Pressure Controllers

683B data sheet
Downstream Pressure Control Products data sheet
Downstream Pressure Control Products data sheet (includes 153D)
Downstream Pressure Control Products data sheet (includes 1651C specifications)
Downstream Pressure Control Products data sheet (includes 253 specifications)
Downstream Pressure Control Products data sheet (includes 651C specifications)
Downstream Pressure Control Products data sheet (includes 653B specifications)
T3BiA data sheet
T3BiB (RoHS compliant) data sheet

Gate Valves

R Series Gate Valve data sheet

Upstream Valves and Pressure Controllers

πPC PC90 Integrated Pressure Controller data sheet
πPC PC99 Integrated Pressure Controller with Mass Flow Meter data sheet
1249 data sheet
244E Pressure/Flow Controller & 245 Control Valve data sheet
250 data sheet
250A data sheet (248 specifications are included in this document)
250E data sheet (148J information is included in this document)
250E data sheet (with 154A specifications)
640A/641A data sheet
640B/641B data sheet
649A data sheet
649B data sheet
DPC data sheet

Vacuum Isolation Valves

150/160 & V-100 Valve data sheet
2-stage Valve data sheet
Auto-Soft data sheet
Ball Valve data sheet
CRV Valve data sheet
CV™ Valve data sheet
ECv Compact Electric Vacuum Valve data sheet
Heated Ball Valve data sheet
High Cycle Valve (HCV) data sheet
High Flow Valve data sheet
Jalapeño Valve data sheet
Jalapeño LoPro™ Heated Valve data sheet
LoPro™ 2-Stage Valve data sheet
LoPro™ Single Stage Low-Profile Valve data sheet
UHV Valve data sheet

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Contact MKS Instruments by sending an email to MKS or call 800-227-8766 (in the USA), or 978-645-5500 (world-wide).