Repair, Calibration & Refurbishment
MKS Global Service

MKS has developed an enhanced Repair Services Program to provide additional cost effective solutions for repairing your MKS products. As your global support partner, MKS offers industry-leading product knowledge and expertise to guarantee your competitive advantage. Our Repair Services Program assigns products into one of two categories:

Standard Repair:

  • 100% replacement of defective minor assemblies using MKS original spare parts
  • Safety and software updates
  • Full calibration
  • Performance testing to MKS factory specifications
  • Service report
  • 90-day warranty

Refurbishment:

  • 100% replacement of defective major assemblies using MKS original spare parts
  • Rebuilding equipment to "like new" condition
  • Safety and software updates
  • Full performance testing and calibration to MKS factory specifications
  • Service report
  • Up to 1 year warranty

Learn more:

Certified Refurbishment for Power Generators
A program specifically for MKS RF & DC Power Generators.

How to Order Services
Instructions and options for ordering MKS repair and calibration services.

RMA Form
Use this form for Return Authorizations

Health & Safety Form
This must be completed and included with equipment being sent to us for calibration and/or repair.

Need more help?

Contact an MKS Service Specialist by sending an email to MKS or call: 800-227-8766 or 978-645-5500 (outside the USA).