MKS Global Service

MKS offers a full range of value-added Service Programs to improve productivity and attain a high return on investment. As your support partner with Service Centers located at key locations, we provide industry-leading product knowledge and expertise to guarantee your competitive advantage and long-term success.

world map with MKS service facilities

Features & Benefits:

  • Increased tool availability, performance, and productivity
  • Extended uptime
  • Long-term product stability and reliability
  • Latest test procedures exclusive for MKS factory-approved specifications
  • Customized service and repair agreements, upgrades & enhancements
  • Factory-trained MKS engineers to free up customer resources
  • Fast on-site support, startup/commissioning
  • 24 x 7 telephone support

Global Service Options:

Field Services
World-class on-site assistance, including preventative maintenance, operations training, upgrade support, and installation & setup.

Repair, Calibration & Refurbishment
The most cost-effective way to maintain and upgrade your MKS products.

Key MKS Global Service Links:

MKS Global Services Brochure
Download the latest overview of our vast offerings.

RMA Form
Use this form for Return Authorizations

Health & Safety Form
This must be completed and included with equipment being sent to us for calibration and/or repair.

How to Order Services
Instructions and options for ordering MKS repair and calibration services.

Need more help?

Contact MKS Global Service Specialists by sending an email to MKS or call: 800-227-8766 or 978-645-5500 (outside the USA).