640B Absolute Pressure Controller
for Closed-Loop Electronic Pressure Control

photo - 640 Absolute Pressure Controller for Closed-Loop Electronic Pressure Control

The MKS Instruments RoHS-compliant 640B Absolute Pressure Controller is a self-contained compact, closed-loop electronic control system used for upstream or downstream pressure control. It contains a Baratron® Capacitance Manometer, normally-closed proportioning control valve, and closed-loop control electronics.

Electrically similar to a standard MFC, the 640B is powered by ±15 VDC at only 200 mA, permitting use with standard power supply/display electronics. The pressure output and input control signals are linear 0-5 or 0-10 VDC, user-selectable. Two trip points are included in the 640B, with LED status indicators, for use as simple on/off process limits.

Features & Benefits:

  • Integrated Baratron® manometer for accuracy, reliability, and wide range
  • Full Scale ranges as low as 10 Torr for low pressure processes
  • Upstream or downstream applications

Applications:

Typical 640B applications include bubbler back pressure control, gas manifold pressure control, and wafer backside pressure control.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

VCR® is a registered trademark of Swagelok® Company.

Configurations:

Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberFull Scale Pressure RangeFittingsSealValve OrificeRoHSCAD DiagramsPriceQTY
640B11TW1M12M10 TorrSwagelok® 4 VCR® maleMetal#1 (200 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B11TW1M12V10 TorrSwagelok® 4 VCR® maleMetal#1 (200 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B11TW1M22M10 TorrSwagelok® 4 VCR® maleMetal#2 (1000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B11TW1M22V10 TorrSwagelok® 4 VCR® maleMetal#2 (1000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B11TW1M32M10 TorrSwagelok® 4 VCR® maleMetal#3 (5000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B11TW1M32V10 TorrSwagelok® 4 VCR® maleMetal#3 (5000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B12TW1M12M100 TorrSwagelok® 4 VCR® maleMetal#1 (200 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B12TW1M12V100 TorrSwagelok® 4 VCR® maleMetal#1 (200 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B12TW1M22M100 TorrSwagelok® 4 VCR® maleMetal#2 (1000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B12TW1M22V100 TorrSwagelok® 4 VCR® maleMetal#2 (1000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B12TW1M32M100 TorrSwagelok® 4 VCR® maleMetal#3 (5000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B12TW1M32V100 TorrSwagelok® 4 VCR® maleMetal#3 (5000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B12TW1V12V100 TorrSwagelok® 4 VCR® maleViton#1 (200 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B12TW1V22V100 TorrSwagelok® 4 VCR® maleViton#2 (1000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B12TW1V32V100 TorrSwagelok® 4 VCR® maleViton#3 (5000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B13TW1M12M1000 TorrSwagelok® 4 VCR® maleMetal#1 (200 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B13TW1M22M1000 TorrSwagelok® 4 VCR® maleMetal#2 (1000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B13TW1M32M1000 TorrSwagelok® 4 VCR® maleMetal#3 (5000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B13TW1V12V1000 TorrSwagelok® 4 VCR® maleViton#1 (200 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B13TW1V22V1000 TorrSwagelok® 4 VCR® maleViton#2 (1000 sccm)yes123422B.dwg
123422B.dxf
Quote Only
640B13TW1V32V1000 TorrSwagelok® 4 VCR® maleViton#3 (5000 sccm)yes123422B.dwg
123422B.dxf
Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.