Vision 2000-P™ XD
High Sensitivity Process Monitor for Select Pressure & PVD
The Vision 2000-P™ XD incorporates V-lens™ technology, taking the proven performance of the Vision 2000-P™ system to a new level of sensitivity and reliability, previously unachievable with conventional quadrupole mass spectrometry systems.
The patented V-lens™ design enables significantly improved detection power for the most challenging thin film PVD processes where ppb detection of contaminants, gas leaks, or process gases is required. V-lens™ overcomes the issues faced with challenging gases (such as Argon) that limit the detection power of conventional systems, providing a clear advantage for monitoring and detection of trace gases. With V-lens technology, process engineers can identify and prevent issues faster and easier while maximizing yield. In combination with the "smart head" RGA technology of the Microvision 2, closed ion source and close-coupled inlet, this configuration enables sensitive, reproducible and seamless monitoring of the most challenging PVD applications.