Microwave Plasma Source
High Power Source for New & Existing Plasma Applications
The MKS High Power Microwave Plasma Source (MPS) can be combined with a 6kW microwave generator for a high concentration of radicals providing a high productivity manufacturing solution. The MPS source is capable of igniting in multiple process gases, over a wide operating range with performance benefits in current and emerging applications such as, high throughput photoresist removal, advanced surface cleaning and conditioning, as well as, advanced deposition applications at the atomic level.
The MKS High Power Microwave Plasma Source is ideal for use with MKS microwave plasma systems, comprised of an MKS microwave power generator, waveguide components, and the advanced SmartMatch® intelligent matching unit. Designed with a high efficiency field replaceable plasma applicator, this new microwave plasma source delivers optimal cost of ownership advantages.
MKS engineering and applications groups collaborate with our customers to determine the optimum configuration, as well as, consultation and process verification services for customer-specific applications at an MKS plasma lab.