High Power Microwave Plasma Source
Overview
- Higher productivity compatible with 6kW MKS microwave generator
- High power technology enables processes with high output of H* radicals
- Wider operating range and higher flow capability for higher throughput
- Delivers a high concentration of radicals at low electron temperature for advanced applications
- Brass-free component design
- Backward compatible with existing 3kW SmartPower® installed base
Products
Specifications
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TypeHigh Power Plasma Source
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Plasma Tube MaterialHMPSQ-MKS: Quartz
HMPSS-MKS: Sapphire -
Operating Frequency2.44-2.47 GHz
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Maximum Power6 kW
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Operating Pressure1-10 Torr
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Total Gas Flow1-10 slm
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Minimum Water Flow0.50 gpm at min 37 psid
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WaveguideWR284
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Waveguide Flange ConnectionCPR284F with bolts
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Water Inlet Connection3/8 inch Swagelok®
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Water Outlet Connection3/8 inch Swagelok®
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Electrical Requirements for UV Lamp24 VDC, 1.0 Amp
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Gas Line Connection4 VCR® male
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Dimensions18.52 x 4.5 x 6.32 inches
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Weight18 lbs
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ComplianceCE
Resources
Drawings & CADs
- High Power Microwave Plasma Source Dimensional Drawing (265 kB, PDF)
Literature
- Microwave Plasma Source (290.7 kB, PDF)
Ultra-High Velocity