Microwave Plasma Source
High Power Source for New & Existing Plasma Applications

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The MKS High Power Microwave Plasma Source (MPS) can be combined with a 6kW microwave generator for a high concentration of radicals providing a high productivity manufacturing solution. The MPS source is capable of igniting in multiple process gases, over a wide operating range with performance benefits in current and emerging applications such as, high throughput photoresist removal, advanced surface cleaning and conditioning, as well as, advanced deposition applications at the atomic level.

The MKS High Power Microwave Plasma Source is ideal for use with MKS microwave plasma systems, comprised of an MKS microwave power generator, waveguide components, and the advanced SmartMatch® intelligent matching unit. Designed with a high efficiency field replaceable plasma applicator, this new microwave plasma source delivers optimal cost of ownership advantages.

MKS engineering and applications groups collaborate with our customers to determine the optimum configuration, as well as, consultation and process verification services for customer-specific applications at an MKS plasma lab.

Features & Benefits:

  • Higher productivity compatible with 6kW MKS microwave generator and autotuner
  • High power technology enables processes with high output of H* radicals
  • Wider operating range and higher flow capability for higher throughput
  • Delivers a high concentration of radicals at low electron temperature for advanced semiconductor and flat panel display applications
  • Brass-free component design
  • RoHS compliant
  • Backward compatible with existing 3kW SmartPower® installed base
  • New thermal management design improvements, enables source tube lifetimes greater than 3x versus AX7610
  • Upgrade kit reduces Cost of Ownership of installed base production and enables new process applications

Configurations:

Purchase now or request a quote:
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Part NumberPriceQTY
Microwave Plasma Source AX22000Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 978-284-4000.