DA01A i-Baratron®
DeviceNet Capacitance Manometer with Digital Communications

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The MKS i-Baratron® DA01A DeviceNet Absolute Capacitance Manometer is a dual-output absolute vacuum transducer with both DeviceNet digital communications and legacy 0-10 VDC analog output signals.

Available in four different operating temperatures for different applications, the i-Baratron® uses an efficient microprocessor-based digital structure that provides exceptional stability and repeatability under demanding conditions such as semiconductor manufacturing equipment. The i-Baratron® also uses the patented MKS all-welded Inconel® diaphragm sensor, which has exceptionally high resistance to corrosion from common process chemicals and is able to tolerate bursts of pressure to as much as 45 psia (310 kPa) without suffering physical damage or permanent calibration shifts. The DeviceNet communications and main power are fed through a bayonet-style 5-pin connector on the top of the product, and the analog output signal is available on the standard 9-pin D-subminiature electrical connector. The product is available in ambient, 45°C, 80°C, and 100°C versions in Full Scale pressure ranges from 1000 to 1 Torr (133 to 0.13 kPa) for the ambient models, and 1000 to 0.1 Torr (133 to 0.013 kPa) for the heated versions. The products are CE marked to meet EMC Directive 2004/108/EC, and compliant with current European Union RoHS (Reduction of Hazardous Substances) directives.

Features & Benefits:

  • Excellent long-term stability
  • Microprocessor-based electronics provide superior accuracy and repeatability
  • Full Scale ranges of 1000 to 1 Torr/mbar (Unheated), 1000 to 0.1 Torr/mbar (Heated)
  • 100% back-compatible with previous MKS Types DMA and DMB i-Baratron® products
  • Fully-welded Inconel and Incoloy® sensor offers extremely high corrosion resistance from common process gases
  • Standard or etch sensors available
  • High overpressure specification of 45 psia (3 bar/310 kPa) prevents shifting or permanent calibration changes
  • CE approved and RoHS (Restriction of Hazardous Substances) compliant

Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.


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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.