IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 250 to 500 slm

IE500A IP66-rated, Elastomer-sealed, Mass Flow Controller - click to enlarge
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The IE500A mass flow controller is elastomer-sealed, multi-gas/multi-range MFC designed for use in harsh industrial environments where resistance to liquid and dust ingress are essential.

The IE500A can be ranged from 250 slm to 500 slm (N2 equivalent). This broad flow range is enabled by the unique control valve design, which responds rapidly to setpoint changes while maintaining closed conductance leak rates that are well below other high flow mass flow controllers.

Settling times of 2 to 3 seconds and setpoint accuracy below 1% of setpoint exceeds typical high flow mass flow controllers. Precise control is maintained down to 2% of the IE500A's configured Full Scale flow range. Multi-gas/multi-range capability and tight performance specifications for accuracy, control range, and transient response minimize flow controller inventory requirements.

The multi-gas/multi-range feature and other custom controls are accessed through the embedded diagnostic interface. A standard Ethernet cable and JAVA-enabled HTML browser are the only tools needed. Critical gas parameters for typical high flow rate gases are already stored on the MFC. Configure an I-Series mass flow controller by selecting the gas from a drop-down menu and specify the desired Full Scale flow range. Perform routine device health checks, plot flow response, and store operating data for offline analysis with the I-Series MFC diagnostic interface.

Features & Benefits:

  • IP66-rated enclosure protects against water & dust in harsh environments
  • Fast response to setpoint change reduces flow stabilization time
  • Tight flow accuracy improves process matching
  • Reduced inlet pressure (pressure drop) requirement simplifies gas supply regulation
  • Multi-Gas/Multi-range reduces MFC inventory
  • Configuration/diagnostics via Ethernet & web browser - no special software needed


The MKS IE500A mass flow controller is designed for industrial applications where "hose down" may be required, such as industrial glass production where moisture and particulates are present. With its IP66-rated enclosure, the IE500A meets the stringent requirements of these aggressive environments.