AX7610 Chemical Downstream Plasma Source

photo - AX7610-Q Chemical Downstream Plasma Source

The AX7610 is a microwave plasma source for remote plasma applications. With replaceable quartz or sapphire plasma tubes, the AX7610 downstream source offers configuration flexibility to meet the most demanding application process parameters. The quartz tube version is ideally suited for production of atomic oxygen, nitrogen or argon. The sapphire tube version is compatible with much more severe CF4 CHF3 and NF3 chemistries.

The patented conductively-cooled design of the plasma tube supports high throughput and high power (up to 3kW) operation. The wide process window allows for AX7610 use in multiple applications from fast and damage free PR and polymer removal for 300mm wafers to fine-control atomic layer PECVD processes.

Features & Benefits:

  • Wide application range
  • Easy integration
  • Sapphire or quartz discharge tubes
  • Patented conductively-cooled design

Configurations:

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Part NumberPriceQTY
AX7610Quote Only

Documents & Downloads:

AX7610 data sheet
AX7610 specifications

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 978-284-4000.