649B Compact Pressure Controllers
with Integral Baratron® Capacitance Manometer and Mass Flow Meter

photo - 649 Compact Pressure Controller with Integral Baratron Capacitance Manometer and Mass Flow Meter

The RoHS-compliant 649B Pressure Controller is a single instrument that provides both pressure control and flow metering, replacing multiple component subassemblies. The 649B Pressure Controller compact design allows for significant reduction in BWCS (backside wafer cooling systems) size and complexity.

Features & Benefits:

  • Designed For The Most Demanding Processes
  • Reliable, Rugged, Repeatable
  • Easily Integrated

Configurations:

Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberPriceQTY
649B (RoHS compliant)Quote Only
649A (standard)Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.