641B Gage Pressure Controller
for Closed-Loop Electronic Pressure Control

photo - 641 Gage Pressure Controller for Closed-Loop Electronic Pressure Control

The MKS Instruments RoHS-compliant 641B Gage Pressure Controller is a self-contained, compact, closed-loop electronic control system used for upstream or downstream pressure control. It contains a Baratron® Capacitance Manometer, normally-closed proportioning control valve, and closed-loop control electronics.

Electrically similar to a standard MFC, the 641B Gage Pressure Controller for Closed-Loop Electronic Pressure Control is powered by ±15 VDC at only 200 mA, permitting use with standard power supply/display electronics. The pressure output and input control signals are linear 0-5 or 0-10 VDC, user-selectable. Two trip points are included in the 641B, with LED status indicators, for use as simple on/off process limits.

Features & Benefits:

  • Integrated Baratron® manometer for accuracy, reliability, and wide range
  • Full Scale ranges as low as 10 Torr for low pressure processes
  • Upstream or downstream applications

Applications:

Typical 641B applications include bubbler back pressure control, gas manifold pressure control, and wafer backside pressure control.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

VCR® is a registered trademark of Swagelok® Company.

Configurations:

Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberFull Scale Pressure RangeFittingsSealValve OrificeRoHSCAD DiagramsPriceQTY
641B11TS1V42V10 TorrSwagelok® 1/4"Viton#4 (10,000 sccm)yes125971A.dwg
125971A.dxf
Quote Only
641B11TW1V42V10 TorrSwagelok® 4 VCR® maleViton#4 (10,000 sccm)yes125973A.dwg
125973A.dxf
Quote Only
641B12TS1V42V100 TorrSwagelok® 1/4"Viton#4 (10,000 sccm)yes125971A.dwg
125971A.dxf
Quote Only
641B12TW1V42V100 TorrSwagelok® 4 VCR® maleViton#4 (10,000 sccm)yes125973A.dwg
125973A.dxf
Quote Only
641B13TS1V42V1000 TorrSwagelok® 1/4"Viton#4 (10,000 sccm)yes125971A.dwg
125971A.dxf
Quote Only
641B13TW1V42V1000 TorrSwagelok® 4 VCR® maleViton#4 (10,000 sccm)yes125973A.dwg
125973A.dxf
Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.