631D Baratron® Heated Absolute Capacitance Manometers
(1-1000 Torr), Temperature controlled to 150 or 200°C
Direct, Absolute, Analog Pressure/Vacuum Measurement
The Baratron® 631D is the RoHS-compliant version of the high temperature capacitance manometer that MKS Instruments introduced more than 10 years ago. These devices operate at very high internal temperatures that minimize the deposition of process byproducts within the sensor, which nearly eliminates output drift caused by such contamination. Its available operating temperatures are 150°C or 200°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD). Its new packaging reduces the amount of installation space needed by at least 40%, making it even easier to design into new systems or retrofit into existing equipment.
The 631D is completely self-contained, requiring only input power of ±15VDC for operation. No separate electronics modules are used, which both reduces the amount of installation space needed and provides better performance due to elimination of noisegenerating interconnecting cables. Its Inconel® sensor offers extremely high resistance to corrosion, and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions. The Type 631D high-performance analog electronics also include fail-safe overtemperature protection and LED status lamps to indicate its operating state. An internally-mounted set of two (2) UL-approved solid-state trip relays for pressure and one (1) UL-approved electromechanical relay for heater failure is also available, allowing the manometer to control external equipment or components. The pressure trip relays may be adjusted by the user independently at atmospheric pressure, eliminating the need for vacuum pumps during setpoint adjustment.