D28F Baratron® Heated Dual-Range Absolute Capacitance Manometer
(1-1000 Torr), Temperature Controlled to 100°C
Direct, Absolute, Analog Pressure/Vacuum Measurement
MKS Baratron® Type D28F Dual-Range Manometer is a RoHS-compliant applications specific absolute capacitance manometer based on the latest MKS family of general purpose manometers. It features the added capability of providing two distinct measurement outputs to provide accurate, reliable, and repeatable pressure measurements for multi-step processes. The D28F is temperature controlled at 100°C, and is available in full scale ranges of 1, 10, 100 and 1000 Torr, with a customer specified second output having either a 2, 5, or 10 times lower full scale pressure output to provide a proportionally higher sensitivity. The lower pressure limitation of system A/D resolution is now minimized with higher output signal levels. The D28F requires ±15 VDC (±5%) input at 500 mA (max.), and provides two outputs of 0 to 10 VDC linear with pressure.
Based on the well-established Baratron capacitance manometer technology, the sensor's wetted surfaces are made of Inconel® for corrosion resistance and process compatibility. Measurements are independent of gas composition. The modern stainless steel enclosure provides a cleanroom compatible product.