D28F Baratron® Heated Dual-Range Absolute Capacitance Manometer
(1-1000 Torr), Temperature Controlled to 100°C
Direct, Absolute, Analog Pressure/Vacuum Measurement

photo - D28F Baratron Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C

MKS Baratron® Type D28F Dual-Range Manometer is a RoHS-compliant applications specific absolute capacitance manometer based on the latest MKS family of general purpose manometers. It features the added capability of providing two distinct measurement outputs to provide accurate, reliable, and repeatable pressure measurements for multi-step processes. The D28F is temperature controlled at 100°C, and is available in full scale ranges of 1, 10, 100 and 1000 Torr, with a customer specified second output having either a 2, 5, or 10 times lower full scale pressure output to provide a proportionally higher sensitivity. The lower pressure limitation of system A/D resolution is now minimized with higher output signal levels. The D28F requires ±15 VDC (±5%) input at 500 mA (max.), and provides two outputs of 0 to 10 VDC linear with pressure.

Based on the well-established Baratron capacitance manometer technology, the sensor's wetted surfaces are made of Inconel® for corrosion resistance and process compatibility. Measurements are independent of gas composition. The modern stainless steel enclosure provides a cleanroom compatible product.

Features & Benefits:

  • Second output provides greater resolution over lower ranges
  • Percent of Reading accuracy for repeatable output
  • Measures total pressure directly, independent of gas composition
  • Integrated sump for particle protection
  • High overpressure rating for reliability
  • All Inconel® sensor and wetted surfaces for corrosion resistance

Applications:

The modern stainless steel enclosure makes the D28F cleanroom-compatible. Its dual output makes the D28F ideal for multi-step processes.

Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberPrimary FullScale RangeFittingCalibration OrientationSecond Range Gain RatioPriceQTY
D28F13TCEE0B01000 Torr (mm Hg)Swagelok® 8 female VCR®Vertical10Quote Only
D28F12TGAE0B0100 Torr (mm Hg)NW16-KFVertical10Quote Only
D28F11TCEE5B510 Torr (mm Hg)Swagelok® 8 female VCR®Horizontal5Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.