E29F Baratron® Heated Absolute Capacitance Manometer, Etch Sensor
(0.02-100 Torr), Temperature Controlled to 45 or 100°C, with 9-pin D-Subminiature Electrical Connector
Direct, Absolute, Analog Pressure/Vacuum Measurement

photo - E29F Baratron Heated Absolute Capacitance Manometer, Etch Sensor (0.02-100 Torr), Temperature Controlled to 45 or 100 degrees C, with 9-pin D-Subminiature Electrical Connector

Based on the industry standard Baratron® capacitance manometer technology, the E29F Etch Manometer features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. The E29F Etch Manometer is temperature controlled to either 45°C or 100°C, and includes efficient temperature control electronics to provide superior long-term stability and repeatability. It has an optional external zero input, which accepts a voltage equal to and opposite to the zero offset, to provide a zero output at zero pressure. The optional "At Temperature" LED/switch indicates that the sensor is at the controlled temperature.

Features & Benefits:

  • Percent of Reading accuracy for precise output in low pressure ranges
  • Full Scale ranges low as 20 mTorr for precise measurement of low pressure processes
  • Measures total pressure directly, independent of gas composition
  • Inconel® wetted surfaces are corrosion-resistant
  • Integrated sump for particle protection
  • Fast warm-up time
  • High overpressure rating for improved reliability

Applications:

The Baratron® E29F is specifically designed for difficult etch and chemical vapor deposition (CVD) processes that can cause sensor contamination.

Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberTemperatureFull Scale RangeFittingAccuracyOptionsPriceQTY
E29F11TBEL1B100oC10 Torr (mm Hg)Swagelok® 8 female VCR®0.0025NoneQuote Only
E29F11TDCJ2B45oC10 Torr (mm Hg)NW16-KF0.0012Heater Status IndicatorQuote Only
E29F.1TBFL1B100oC0.1 Torr (mm Hg)Swagelok® 8 female VCR®0.005NoneQuote Only
E29F.1TDFL6B100oC0.1 Torr (mm Hg)NW16-KF0.005Heater Status & Horizontal CalibrationQuote Only
E29FU5TBFL1B100oC0.05 Torr (mm Hg)Swagelok® 8 female VCR®0.005NoneQuote Only
E29FU2TDEJ6B45oC0.02 Torr (mm Hg)NW16-KF0.0025Heater Status & Horizontal CalibrationQuote Only

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.