E29F Baratron® Heated Absolute Capacitance Manometer, Etch Sensor
(0.02-100 Torr), Temperature Controlled to 45 or 100°C, with 9-pin D-Subminiature Electrical Connector
Direct, Absolute, Analog Pressure/Vacuum Measurement

photo - E29F Baratron Heated Absolute Capacitance Manometer, Etch Sensor (0.02-100 Torr), Temperature Controlled to 45 or 100 degrees C, with 9-pin D-Subminiature Electrical Connector

The Baratron® Etch Sensor Manometer is the solution for etch process-induced drift. The RoHS-compliant E29F helps eliminate process byproduct deposits on the surface of the diaphragm, minimizing drift. The E29F Etch Manometer is temperature controlled to either 45°C or 100°C, and includes efficient temperature control electronics to provide superior long-term stability and repeatability. It has an optional external zero input, which accepts a voltage equal to and opposite to the zero offset, to provide a zero output at zero pressure. The optional "At Temperature" LED/switch indicates that the sensor is at the controlled temperature.

Features & Benefits:

  • Percent of Reading accuracy for precise output in low pressure ranges
  • Full Scale ranges low as 20 mTorr for precise measurement of low pressure processes
  • Measures total pressure directly, independent of gas composition
  • Inconel® wetted surfaces are corrosion-resistant
  • Integrated sump for particle protection
  • Fast warm-up time
  • High overpressure rating for improved reliability

Applications:

The Baratron® E29F is specifically designed for difficult etch and chemical vapor deposition (CVD) processes that can cause sensor contamination.

Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberTemperatureFull Scale RangeFittingAccuracyOptionsPriceQTY
E29F11TBEL1B100oC10 Torr (mm Hg)Swagelok® 8 female VCR®0.0025NoneQuote Only
E29F11TDCJ2B45oC10 Torr (mm Hg)NW16-KF0.0012Heater Status IndicatorQuote Only
E29F.1TBFL1B100oC0.1 Torr (mm Hg)Swagelok® 8 female VCR®0.005NoneQuote Only
E29F.1TDFL6B100oC0.1 Torr (mm Hg)NW16-KF0.005Heater Status & Horizontal CalibrationQuote Only
E29FU5TBFL1B100oC0.05 Torr (mm Hg)Swagelok® 8 female VCR®0.005NoneQuote Only
E29FU2TDEJ6B45oC0.02 Torr (mm Hg)NW16-KF0.0025Heater Status & Horizontal CalibrationQuote Only

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.