D27F Baratron® Heated Dual-Range Absolute Capacitance Manometer
(1-1000 Torr), Temperature Controlled to 45°C
Direct, Absolute, Analog Pressure/Vacuum Measurement

photo - D27F Baratron Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 45 degrees C

MKS Baratron® D27F Dual-Range Manometer is a RoHS-compliant applications specific absolute capacitance manometer based on the latest MKS family of general purpose manometers. It features the added capability of providing two distinct measurement outputs to provide accurate, reliable, and repeatable pressure measurements for multi-step processes. The D27F is temperature controlled at 45°C, and is available in full scale ranges of 1, 10, 100 and 1000 Torr, with a customer specified second output having either a 2, 5, or 10 times lower full scale pressure output to provide a proportionally higher sensitivity. The lower pressure limitation of system A/D resolution is now minimized with higher output signal levels. The D27F requires ±15 VDC (±5%) input at 250 mA (max.), and provides two outputs of 0 to 10 VDC linear with pressure.

Based on the well-established Baratron capacitance manometer technology, the sensor's wetted surfaces are made of Inconel® for corrosion resistance and process compatibility. Measurements are independent of gas composition. The modern stainless steel enclosure provides a cleanroom compatible product.

Features & Benefits:

  • Second output provides greater resolution over lower ranges
  • Percent of Reading accuracy for more repeatable output signal
  • Measures total pressure directly, independent of gas composition
  • Integrated sump for particle protection
  • High overpressure rating for improved reliability
  • All Inconel® sensor and wetted surfaces for corrosion resistance

Applications:

The modern stainless steel enclosure makes the D27F cleanroom-compatible. Its dual output makes the D27F ideal for multi-step processes.

Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

Purchase now or request a quote:
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Part NumberPrimary FullScale RangeFittingCalibration OrientationSecond Range Gain RatioPriceQTY
D27F11TCEC0B010 Torr (mm Hg)Swagelok® 8 female VCR®Vertical10Quote Only
D27F11TGAC0B010 Torr (mm Hg)NW16-KFVertical10Quote Only
D27F11TGAC0B510 Torr (mm Hg)NW16-KFVertical5Quote Only
D27F01TCEC5B01 Torr (mm Hg)Swagelok® 8 female VCR®Horizontal10Quote Only
D27F01TGAC0B01 Torr (mm Hg)NW16-KFVertical10Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.