RPDG-200 20kW Pulsed DC Plasma Generator
Pulsed DC Generator 20 kilowatt High Frequency Asymmetric Bipolar Pulsed DC Power for Plasma Applications

photo - RPDG-200 20kW Pulsed DC Plasma Generator

RPDG-200 is a 20,000W Asymmetric Bipolar Pulsed DC system that enables deposition of a wide variety of low defect insulating films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN. The system is comprised of a pulse master unit driving a 20kW DC slave providing up to 20kW in a single output.


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Contact an Applications Specialist by sending an email to MKS Instruments or call 585-427-8300.