GBR3B Tru-Flo® Mass Flow Verifier
The MKS Tru-Flo® Mass Flow Verifier(MFV) is a fully integrated diagnostic instrument that provides in situ verification of mass flow controller (MFC) performance on semiconductor process tools. The Tru-Flo® MFV mass flow verifier measures a pressure rate-of-rise into a known volume at a known temperature to determine mass flow to within ±1% of Reading. It consists of a small gas volume, an MKS Baratron® pressure sensor, shut off valves, and control electronics combined into a single compact package. Tru-Flo® mass flow verifier can be easily incorporated into a process tool gas panel and communicates with a tool host computer via an RS-232 interface.