4-channel, Standalone Ozone Delivery System

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The SEMOZON® AX8555 Ozone Delivery System is configurable with up to four (4) independent channels to support multiple ALD tools or chambers concurrently. Each channel can be matched to the specific concentration and flow required for your specific process. It includes all subassemblies required for stand-alone operation, including power distribution, an ambient ozone safety monitor, status indicator panel, and optional integrated ozone destructs for each channel.

Ozone Performance:

SEMOZON® AX8555 Performance

Features & Benefits:

  • Highest Ozone Concentration
  • Ultra clean Ozone
  • Compact footprint
  • Low cost of ownership


The SEMOZON® AX8555 4-channel, Standalone Ozone Delivery System is specifically designed for advanced semiconductor process applications such as Atomic Layer Deposition (ALD). Other typical ozone applications include chemical vapor deposition (CVD), photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.