LIQUOZON® Smart
High Output 50 slm 3 channel Ozone Water Delivery System

LIQUOZON Smart High Output 50 slm 3 channel Ozone Water Delivery System - click to enlarge
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The LIQUOZON® Smart ozonated water delivery system is a self-contained unit that provides DIO3 water (ultra pure ozonated water) with exceptionally high, accurate and stable ozone concentration utilizing constant pressure. The basic LIQUOZON Smart configuration is for flows up to 25 liters per minute, the High Flow option is able to handle flow up to 50 liters per minute - for multiple outlets, flow rates up to 80 liters per minute are available. Maximum dissolved ozone concentration is 80ppm.

The ozone gas generator is the highly reliable SEMOZON® which produces ozone from oxygen by silent discharge. A minute amount of carbon dioxide (CO2) is used as a dopant gas. The CO2 considerably increases the lifetime of ozone in the DI water and is ultra-clean. With CO2 there is no possibility of formation of NOx compounds or resultant metal contamination. High-quality, ozone resistant materials and the unique doping technique ensure ultra-clean ozonated water delivery for high-purity semiconductor and flat panel applications.