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Mass-Flo® Vapor Source Mass Flow Controller with Viscous Laminar Flow
Overview
The 1152C Mass-Flo® Vapor Source Mass Flow Controller is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas. The 1152C consists of a fixed flow element and two capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control.
Specifications
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Flow MethodViscous flow through a laminar flow tube
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Full Scale Flow Range1 to 1000 sccm typical
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Control Range5.0 to 100% of Full Scale
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Typical Accuracy±5.0% of Full Scale
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Repeatability±0.2% of Full Scale
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Resolution±0.1% of Full Scale
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Operating Temperature30°C to 100°C, adjustable
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Optional Operating Temperature Range90°C to 150°C
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Settling Time1 second to within 2% of set point
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Controller Input Power Required±15 VDC (±2%) @ 0.28 Amps
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Heater Input Power Required±15 VDC @ 1.5 Amps
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Set Point Signal0-5 VDC from <20 KΩ
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Flow Output Signal0-5 VDC into >10 KΩ
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Temperature Output10 mV/°C
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Relay Contact Ratings2 Amps @ 28 VDC; 1 Amp @ 120 VAC resistive
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Signal Connector15-pin Type "D", RFI/EMI shielded
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Heater Connector9-pin Type "D", RFI/EMI shielded
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Maximum Line Pressure35 psia
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External Leak Integrity<1 x 10-9 scc/sec He
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Leak Integrity Through Closed Valve<1% of Full Scale or 1 sccm, whichever is greater
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Wetted MaterialsInconel, 316 S.S., nickel
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Mounting PositionDo not mount upside-down
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Fitting TypeSwagelok® 8 VCR® male
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Weight7.9 lbs (3.59 kg)
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ComplianceCE
Resources
Literature
Manuals
- 1152C Mass Flow Controller Operation Manual (164.4 kB, PDF)
- 1150 and 1152 Mass Flow Controller Pin-outs (21.1 kB, PDF)
Ultra-High Velocity