1150C Heated Pressure-Based Mass Flow Controller
Sonic Flow for High Temperature Operation up to 150 degrees C
The MKS Instruments 1150C Heated Pressure-Based Mass Flow Controller Using Viscous Flow Through a Choked Orifice is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.
The 1150C consists of a fixed flow element and one capacitance manometer for flow measurement, with a proportioning solenoid control valve for flow control (U.S. patent No. 4,679,585). The 1150C is contained within a compact temperature-controlled assembly with a temperature status LED and relay to indicate when temperature is in range.
The 1150C Heated Pressure-Based Mass Flow Controller Using Viscous Flow Through a Choked Orifice is capable of delivering vaporized liquid source materials such as: TEOS, DADBS, HMDS, TMCTS, TEAL, TEB, TEG, TEI, TMAL, TMB, TMG, TMI, TaCl5, DMEAA, Ti[OCH(CH3)2]4, TiCl4, TIBAL, and TMP.
Request a Configuration:
- Download the Model Request Form (.DOCX or .PDF)
- Complete the required fields
- Email the completed form to Mark_Townsend@mksinst.com and/or Bill_Corkum@mksinst.com