925 Micro Pirani^™ Vacuum Transducer
(1.0x10^-5 Torr to Atmosphere)
Pressure/vacuum gauges with MEMS-based Micro Pirani^™ vacuum sensors

Features & Benefits:

• Increased measurement range from 10^-5 Torr to Atmosphere, two decades beyond a standard Pirani
• Analog output and digital communication
• Mountable in any orientation
• Three optional set point relays for process control
• Optional local display

Applications:

The 925 Micro Pirani^™ vacuum gauge can be used in many different vacuum monitoring and control applications, such as semiconductor, analytical, and industrial coating (solar) and freeze drying:

• General vacuum pressure measurement
• Foreline and roughing pressure measurement
• Gas backfilling measurement and control
• Mass spectrometer control
• Activation of UHV gauges
• System process control (interlocks, valves, pumps)
• Control system pressure

The 925 Micro Pirani^™ vacuum gauge can be configured with other flanges and vacuum terminations, electrical connectors (Hirschmann, RJ45/FCC68), a UHV enclosure seal, and custom analog output voltages to emulate voltage outputs from a variety of other transducers for "plug and play" replacement of other vendors' gauges in OEM applications without changing system software. Contact MKS Customer Service for details and assistance.

VCR^® compatible parts may be used.
VCR^® is a registered trademark of Swagelok^® Company.