925 Micro Pirani Vacuum Transducer
(1.0x10-5 Torr to Atmosphere)
Pressure/vacuum gauges with MEMS-based Micro Pirani vacuum sensors

925 MicroPirani Vacuum Transducer with Optional Display - click to enlarge
click to zoom

The 925 Micro Pirani vacuum transducer is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. The 925 Micro Pirani offers analog voltage output, digital interface and set point relays for process controlling.

Features & Benefits:

  • Increased measurement range from 10-5 Torr to Atmosphere, two decades beyond a standard Pirani
  • Analog output and digital communication
  • Mountable in any orientation
  • Three optional set point relays for process control
  • Optional local display
  • Analog, RS232, RS485, & EtherCAT® versions

Applications:

The 925 Micro Pirani vacuum gauge can be used in many different vacuum monitoring and control applications, such as semiconductor, analytical, and industrial coating (solar) and freeze drying:

  • General vacuum pressure measurement
  • Foreline and roughing pressure measurement
  • Gas backfilling measurement and control
  • Mass spectrometer control
  • Activation of UHV gauges
  • System process control (interlocks, valves, pumps)
  • Control system pressure

The 925 Micro Pirani vacuum gauge can be configured with other flanges and vacuum terminations, electrical connectors (Hirschmann, RJ45/FCC68), a UHV enclosure seal, and custom analog output voltages to emulate voltage outputs from a variety of other transducers for "plug and play" replacement of other vendors' gauges in OEM applications without changing system software. Contact MKS Customer Service for details and assistance.

VCR® compatible parts may be used.
VCR® is a registered trademark of Swagelok® Company.

Configurations:

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Part NumberFittingCommunicationConnector and RelaysSealDisplaySTEP filePriceQTY
925-17020NW 16 KFEtherCATone 15 pin HD sub-D male, two EtherCAT RJ45, no relayVitonnoneEtherCAT_925-17020KF16.stpQuote Only
925-27020NW 25 KFEtherCATone 15 pin HD sub-D male, two EtherCAT RJ45, no relayVitonnoneEtherCAT_925-27020KF25.STEPQuote Only
925-370201/8 inch NPTEtherCATone 15 pin HD sub-D male, two EtherCAT RJ45, no relayVitonnoneEtherCAT_925-37030NPT.STEPQuote Only
925-470204 VCR-FEtherCATone 15 pin HD sub-D male, two EtherCAT RJ45, no relayVitonnoneEtherCAT_925-47020VCR4.STEPQuote Only
925-87020Long NW 16 KFEtherCATone 15 pin HD sub-D male, two EtherCAT RJ45, no relayVitonnoneEtherCAT_925-87020KF16Long.stpQuote Only
925-11010NW 16 KFRS232/Analog9 pin sub-D male, 1 relay set point (925C compatible)Vitonnone925-1xxxKF16.stpQuote Only
925-11014NW 16 KFRS232/Analog9 pin sub-D male, 1 relay set point (925C compatible)VitonYes925-1xxxKF16.stpQuote Only
925-11020NW 16 KFRS232/Analog15 pin HD sub-D male, no relayVitonnone925-1xxxKF16.stpQuote Only
925-11024NW 16 KFRS232/Analog15 pin HD sub-D male, no relayVitonYes925-1xxxKF16.stpQuote Only
925-11030NW 16 KFRS232/Analog15 pin HD sub-D male, 3 relaysVitonnone925-1xxxKF16.stpQuote Only
925-11034NW 16 KFRS232/Analog15 pin HD sub-D male, 3 relaysVitonYes925-1xxxKF16.stpQuote Only
925-12020NW 16 KFRS485/Analog15 pin HD sub-D male, no relayVitonnone925-1xxxKF16.stpQuote Only
925-12024NW 16 KFRS485/Analog15 pin HD sub-D male, no relayVitonYes925-1xxxKF16.stpQuote Only
925-12030NW 16 KFRS485/Analog15 pin HD sub-D male, 3 relaysVitonnone925-1xxxKF16.stpQuote Only
925-12034NW 16 KFRS485/Analog15 pin HD sub-D male, 3 relaysVitonYes925-1xxxKF16.stpQuote Only
925-21020NW 25 KFRS232/Analog15 pin HD sub-D male, no relayVitonnone925-2xxxKF25.stpQuote Only
925-21024NW 25 KFRS232/Analog15 pin HD sub-D male, no relayVitonYes925-2xxxKF25.stpQuote Only
925-21030NW 25 KFRS232/Analog15 pin HD sub-D male, 3 relaysVitonnone925-2xxxKF25.stpQuote Only
925-21034NW 25 KFRS232/Analog15 pin HD sub-D male, 3 relaysVitonYes925-2xxxKF25.stpQuote Only
925-22020NW 25 KFRS485/Analog15 pin HD sub-D male, no relayVitonnone925-2xxxKF25.stpQuote Only
925-22024NW 25 KFRS485/Analog15 pin HD sub-D male, no relayVitonYes925-2xxxKF25.stpQuote Only
925-22030NW 25 KFRS485/Analog15 pin HD sub-D male, 3 relaysVitonnone925-2xxxKF25.stpQuote Only
925-22034NW 25 KFRS485/Analog15 pin HD sub-D male, 3 relaysVitonYes925-2xxxKF25.stpQuote Only
925-310101/8 inch NPT-FRS232/Analog9 pin sub-D male, 1 relay set point (925C compatible)Vitonnone925-3xxxNPT.stpQuote Only
925-310141/8 inch NPT-FRS232/Analog9 pin sub-D male, 1 relay set point (925C compatible)VitonYes925-3xxxNPT.stpQuote Only
925-310201/8 inch NPT-FRS232/Analog15 pin HD sub-D male, no relayVitonnone925-3xxxNPT.stpQuote Only
925-310241/8 inch NPT-FRS232/Analog15 pin HD sub-D male, no relayVitonYes925-3xxxNPT.stpQuote Only
925-310301/8 inch NPT-FRS232/Analog15 pin HD sub-D male, 3 relaysVitonnone925-3xxxNPT.stpQuote Only
925-310341/8 inch NPT-FRS232/Analog15 pin HD sub-D male, 3 relaysVitonYes925-3xxxNPT.stpQuote Only
925-320201/8 inch NPT-FRS485/Analog15 pin HD sub-D male, no relayVitonnone925-3xxxNPT.stpQuote Only
925-320241/8 inch NPT-FRS485/Analog15 pin HD sub-D male, no relayVitonYes925-3xxxNPT.stpQuote Only
925-320301/8 inch NPT-FRS485/Analog15 pin HD sub-D male, 3 relaysVitonnone925-3xxxNPT.stpQuote Only
925-320341/8 inch NPT-FRS485/Analog15 pin HD sub-D male, 3 relaysVitonYes925-3xxxNPT.stpQuote Only
925-410104 VCR-FRS232/Analog9 pin sub-D male, 1 relay set point (925C compatible)Vitonnone925-4xxxVCR4.stpQuote Only
925-410144 VCR-FRS232/Analog9 pin sub-D male, 1 relay set point (925C compatible)VitonYes925-4xxxVCR4.stpQuote Only
925-410204 VCR-FRS232/Analog15 pin HD sub-D male, no relayVitonnone925-4xxxVCR4.stpQuote Only
925-410244 VCR-FRS232/Analog15 pin HD sub-D male, no relayVitonYes925-4xxxVCR4.stpQuote Only
925-410304 VCR-FRS232/Analog15 pin HD sub-D male, 3 relaysVitonnone925-4xxxVCR4.stpQuote Only
925-410344 VCR-FRS232/Analog15 pin HD sub-D male, 3 relaysVitonYes925-4xxxVCR4.stpQuote Only
925-420204 VCR-FRS485/Analog15 pin HD sub-D male, no relayVitonnone925-4xxxVCR4.stpQuote Only
925-420244 VCR-FRS485/Analog15 pin HD sub-D male, no relayVitonYes925-4xxxVCR4.stpQuote Only
925-420304 VCR-FRS485/Analog15 pin HD sub-D male, 3 relaysVitonnone925-4xxxVCR4.stpQuote Only
925-420344 VCR-FRS485/Analog15 pin HD sub-D male, 3 relaysVitonYes925-4xxxVCR4.stpQuote Only
925-510208 VCR-FRS232/Analog15 pin HD sub-D male, no relayVitonnone925-5xxxVCR8.stpQuote Only
925-510248 VCR-FRS232/Analog15 pin HD sub-D male, no relayVitonYes925-5xxxVCR8.stpQuote Only
925-510308 VCR-FRS232/Analog15 pin HD sub-D male, 3 relaysVitonnone925-5xxxVCR8.stpQuote Only
925-510348 VCR-FRS232/Analog15 pin HD sub-D male, 3 relaysVitonYes925-5xxxVCR8.stpQuote Only
925-520248 VCR-FRS485/Analog15 pin HD sub-D male, no relayVitonYes925-5xxxVCR8.stpQuote Only
925-520348 VCR-FRS485/Analog15 pin HD sub-D male, 3 relaysVitonYes925-5xxxVCR8.stpQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-652-4400.