905 MicroPirani Vacuum Sensor Kit
(1.0x10-5 Torr to Atmosphere) pressure vacuum sensor

photo - 905 MicroPirani Ultra Compact, OEM Vacuum Sensor Kit

The 905 MicroPirani Vacuum Sensor Kit is an ultra-compact wide range vacuum transducer designed for OEM system integration. The transducer is based on well proven thermal conductivity MEMS (Micro-Electron Mechanical Systems) sensor technology and meets the demand for integrated vacuum measurement solutions.

Features & Benefits:

  • Wide measurement range from atmosphere to 10-5 Torr
  • Three open collector set points for advanced process control
  • User-friendly digital control via host processor or computer
  • Robust solid state sensor is resistant to vibrations and g-forces

Applications:

  • Gas analysis - mass spectrometry
  • Scanning electron microscopes
  • Vacuum pumping systems
  • Gas leak detectors
  • Semi surface and thin film analysis
  • Space flight systems
  • Vacuum valves
  • Freeze Drying
  • UHV vacuum gauges
  • Gyroscopes

Configurations:

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-652-4400.