179C Mass-Flo®
Metal-sealed Mass Flow Meter

photo - 179C Mass-Flo Metal-sealed Mass Flow Meter

The MKS 179 is an all-metal mass flow meter (MFM) designed to measure the flow of gases in a wide variety of applications. 179 Mass-Flo® meters are available with Full Scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm.

The 179 is a direct form-fit-function replacement for the most common MFM's on the market today. The standard 3-inch footprint enables the 179 to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type "D" connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 179 is compatible with mass flow controller (MFC) power supply and display electronics from MKS or other manufacturers.

  • Patented sensor design provides exceptional zero stability
  • Full scale flow ranges from 10 sccm to 20 slm for precise and repeatable flow measurement and control
  • Percent of full scale accuracy for analog configurations
  • Rigorous design and testing includes MTBF analysis and STRIFE testing to ensure long-term performance
  • Surface finish of wetted stainless surfaces, cleanroom processing, and minimal use of elastomer seals enable use in demanding clean processes
  • CE Mark and RoHS compliant – meets requirements for European Union
  • Two year warranty ensures quality and customer satisfaction

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberFull Scale RangeFittingsConnectorCAD DiagramsPriceQTY
179C01311CR3BM10 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01311CS3BM10 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only
179C01321CR3BM20 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01321CS3BM20 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only
179C01351CR3BM50 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01351CS3BM50 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only
179C01312CR3BM100 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01312CS3BM100 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only
179C01322CR3BM200 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01322CS3BM200 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only
179C01352CR3BM500 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01352CS3BM500 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only
179C01313CR3BM1,000 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01313CS3BM1,000 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only
179C01323CR3BM2,000 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01323CS3BM2,000 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only
179C01353CR3BM5,000 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01353CS3BM5,000 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only
179C01314CR3BM10,000 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01314CS3BM10,000 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only
179C01324CR3BM20,000 sccm of NitrogenSwagelok® 4 VCR® male15-pin Type "D"125148A.dwg
125148A.dxf
Quote Only
179C01324CS3BM20,000 sccm of NitrogenSwagelok® 1/4 inch tube15-pin Type "D"125144A.dwg
125144A.dxf
Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.