Metal-sealed Mass Flow Meter
The MKS 179 is an all-metal mass flow meter (MFM) designed to measure the flow of gases in a wide variety of applications. 179 Mass-Flo® meters are available with Full Scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm.
The 179 is a direct form-fit-function replacement for the most common MFM's on the market today. The standard 3-inch footprint enables the 179 to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type "D" connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 179 is compatible with mass flow controller (MFC) power supply and display electronics from MKS or other manufacturers.