MC20 ALTA
Digital, Metal-sealed, High Flow Rate Mass Flow Controller

photo - MC20 ALTA Digital, Metal-sealed, High Flow Rate Mass Flow Controller

High Flow, Small Footprint

The all-digital MKS ALTA Mass Flow Controllers (MFC) includes technology improvements in functionality and performance to help users in semiconductor and high purity thin-film applications increase tool throughput and reduce overall system costs. To increase overall system throughput, the ALTA MFC features fast gas settling times to meet the productivity demands of next generation process tools. To facilitate better chamber matching, the ALTA features improved accuracy to 1% of setpoint.

Cost savings to users are seen through several innovative enhancements. To reduce the number of MFCs in inventory, users can recall specific MFC gas calibrations and flow ranges from up to 20 stored gas tables, configuring the ALTA MFC right off the shelf. The ALTA represents MKS' ongoing dedication to helping customers increase productivity while reducing system costs.

VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberConfigurationFlow Range Full Scale sccm of NitrogenFittingsSurface FinishConnectorPriceQTY
MC20A01351LR26VXXDeviceNet™ 50 slmSwagelok® 4 VCR® (50 slm)/16 µinch RaDeviceNet™Quote Only
MC20A01351LM26VXXDeviceNet™ 50 slmSwagelok® 8 VCR® (50,100,200 slm)/16 µinch RaDeviceNet™Quote Only
MC20A01351LR2BVAnalog50 slmSwagelok® 4 VCR® (50 slm)/16 µinch Ra15-pin Type "D" (MKS)Quote Only
MC20A01351LM2BVAnalog50 slmSwagelok® 8 VCR® (50,100,200 slm)/16 µinch Ra15-pin Type "D" (MKS)Quote Only
MC20A01351LR2EVAnalog50 slmSwagelok® 4 VCR® (50 slm)/16 µinch Ra15-pin Type "D" (alternate)Quote Only
MC20A01351LM2EVAnalog50 slmSwagelok® 8 VCR® (50,100,200 slm)/16 µinch Ra15-pin Type "D" (alternate)Quote Only
MC20A01312LR26VXXDeviceNet™ 100 slmSwagelok® 4 VCR® (50 slm)/16 µinch RaDeviceNet™Quote Only
MC20A01312LM26VXXDeviceNet™ 100 slmSwagelok® 8 VCR® (50,100,200 slm)/16 µinch RaDeviceNet™Quote Only
MC20A01312LR2BVAnalog100 slmSwagelok® 4 VCR® (50 slm)/16 µinch Ra15-pin Type "D" (MKS)Quote Only
MC20A01312LM2BVAnalog100 slmSwagelok® 8 VCR® (50,100,200 slm)/16 µinch Ra15-pin Type "D" (MKS)Quote Only
MC20A01312LR2EVAnalog100 slmSwagelok® 4 VCR® (50 slm)/16 µinch Ra15-pin Type "D" (alternate)Quote Only
MC20A01312LM2EVAnalog100 slmSwagelok® 8 VCR® (50,100,200 slm)/16 µinch Ra15-pin Type "D" (alternate)Quote Only
MC20A01322LR26VXXDeviceNet™ 200 slmSwagelok® 4 VCR® (50 slm)/16 µinch RaDeviceNet™Quote Only
MC20A01322LM26VXXDeviceNet™ 200 slmSwagelok® 8 VCR® (50,100,200 slm)/16 µinch RaDeviceNet™Quote Only
MC20A01322LR2BVAnalog200 slmSwagelok® 4 VCR® (50 slm)/16 µinch Ra15-pin Type "D" (MKS)Quote Only
MC20A01322LM2BVAnalog200 slmSwagelok® 8 VCR® (50,100,200 slm)/16 µinch Ra15-pin Type "D" (MKS)Quote Only
MC20A01322LR2EVAnalog200 slmSwagelok® 4 VCR® (50 slm)/16 µinch Ra15-pin Type "D" (alternate)Quote Only
MC20A01322LM2EVAnalog200 slmSwagelok® 8 VCR® (50,100,200 slm)/16 µinch Ra15-pin Type "D" (alternate)Quote Only

Documents & Downloads:

ALTA MC20 data sheet
ALTA MC20 specifications
ALTA MC20 dimensional drawing
ALTA MC20 pin-outs
MC20A 3D STP files
ALTA MC20 analog manual
ALTA MC20 DeviceNet™ manual

Related Products:

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.