DELTA II Flow Ratio Controller
Process Optimization through Precise Ratio Control

photo - DELTA II Flow Ratio Controller

DELTA II Flow Ratio Controller is a critical process control instrument in the MKS line of digital control, web-enabled products providing the latest in gas flow ratio measurement and control technology necessary to meet the demands of multi-channel flow distribution. It divides and controls mixed process gas flows to either multiple chambers or zones within a process chamber at ratios specified by the user maximizing process uniformity and repeatability. Send DELTA II a gas - or any mixture - and a ratio set point and it will split the gas into two separate output channels automatically and precisely.

Features & Benefits:

  • Embedded Ethernet for device monitoring during operation
  • Uses standard web browser - no special software required.
  • Patented control algorithm for faster response-to-ratio setpoint
  • Wider dynamic control range for ratio control down to 5% of flow channel full scale flow
  • Bright LED display for easy viewing of flow ratio, temperature and Ethernet address

Applications:

DELTA II mass flow ratio controller is used in a variety of flow splitting applications such as etch, strip, and CVD.

DELTA II Flow & Ratio Response:

DELTA II ratio controller maintains ratio while input flow is changed - click to enlarge
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