Scrubber Inlet Transition Kit

Wet scrubbers are used in many semiconductor processes to treat byproducts. Water in the scrubber often migrates back into the exhaust line. This can cause surface chemical reactions to occur with system byproducts, which in turn solidify and clog the inlet. This results in system downtime to clean the scrubber inlet.

The Scrubber Inlet Transition Kits are customized to the process chemistries to prevent chemical reactions from occurring or reduce sublimation and keep byproducts moving into the scrubber.

Configurations:

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Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.