Virtual Wall Nitrogen Barrier Devices

Virtual wall by MKS Instruments

Unique to the MKS Instruments, MKS Instruments line of process components is the Virtual Wall. The Virtual Wall is a patented device that provides a boundary layer to piping in the process system. The boundary layer prevents surface chemical reactions from occurring, which leads to byproducts that can clog a system. The Virtual Wall is available in a number of sizes and from a variety of metals and advanced composites. Seals for the Virtual Wall include Viton®, Kalrez® and Chemraz®.

The Virtual Wall is currently being used in a number of semiconductor applications, in a variety of locations in the process including the scrubber inlet, the furnace exit and the pump exit. Processes include:
Virtual wall by MKS Instruments

TEOS

The Virtual Wall is part of the Effluent Management Subsystem for LPCVD TEOS. The Virtual Wall is installed at the furnace exit, with a combination of a specific nitrogen gas flow, heat and custom spool piece.

WCVD

The Virtual Wall is part of the Scrubber Inlet Transition Kit for WCVD. The Virtual Wall is installed at the scrubber inlet, with a combination of a specific nitrogen gas flow, heat and custom spool piece.
Virtual wall by MKS Instruments

Metal Etch

The Virtual Wall is part of the Scrubber Inlet Transition Kit for Aluminum Etch. An advanced composite Virtual Wall is installed at the scrubber inlet, with a combination of a specific nitrogen gas flow, heat and custom spool piece. Additionally for Aluminum Etch, we have developed an Effluent Management Subsystem to combat byproducts from the turbo pump to the scrubber.

Configurations:

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Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.