Metal Etch Trap

photo - Metal Etch Trap

The MKS Instruments, MKS Instruments Metal Etch Trap, when installed as a component in an Effluent Management Subsystem, efficiently traps condensable effluents that are generated by aluminum etch processes without reducing pumping speed. High trapping capacity means a longer time between maintenance. Maintenance is simplified: you replace a single disposable trapping element rather than having to clean up many feet of vacuum line. Low cost of ownership is created by not having to run heated lines all the way to the scrubber.

Configurations:

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Documents & Downloads:

Metal Etch Trap data sheet

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.