Metal Etch Trap
The MKS Instruments, MKS Instruments Metal Etch Trap, when installed as a
component in an Effluent Management Subsystem™,
efficiently traps condensable effluents that are generated by
aluminum etch processes without reducing pumping speed.
High trapping capacity means a longer time between
maintenance. Maintenance is simplified: you replace a single
disposable trapping element rather than having to clean up
many feet of vacuum line. Low cost of ownership is created by not having to run heated lines all the way to the scrubber.