Vapor Sublimation Trap
for Semiconductor Processes

The Vapor Sublimation Trap is widely used in silicon nitride LPCVD and Titanium nitride LPCVD processes where significant amount of NH4Cl byproducts have been observed in the foreline. An MKS trap, with its high capacity and high efficiency, reduces process downtime, increases process yield (because of its high flow conductance), and protects the vacuum pump.

With the combination of an MKS heated line, heated valve, heated Baratron®, and trap, we can significantly improve the process yield and uptime for the silicon nitride LPCVD process.

Note: Heaters and a heater power cord are needed for NW80 angle models and must be ordered separately.

Configurations:

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Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.