317 Convection-Enhanced Pirani Pressure Vacuum Sensors
(1.0x10-3 to 1000 Torr)

photo - 317 Convection-Enhanced Pirani Vacuum Sensors

For greater accuracy at high pressure, the MKS Instruments® 317 Convection-Enhanced Pirani Vacuum Sensor design enhances heat transfer through convection for measurements up to 1000 Torr.

Features & Benefits:

  • Low cost
  • Rugged design
  • Bakable and radiation-resistant versions available

Applications:

317 Convection-Enhanced Pirani Vacuum Sensors are general purpose vacuum gauges for foreline pressure measurement. It can be used in many industrial applications such as semiconductor manufacturing, load locks, leak detection, vacuum coating, and freeze dryers. Bakable and radiation-resistant versions of the 317 Convection-Enhanced Pirani Vacuum Sensor are suitable for high-energy physics applications.

  • Foreline measurement
  • Turbo or diffusion pump control
  • Foreline valve control

VCR® is a registered trademark of Swagelok Company.

Configurations:

Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberDescriptionPriceQTY
103170010SHSeries 317 Shielded Convection-Enhanced Pirani Sensor, NW 16 KFQuote Only
103170011SHSeries 317 Shielded Convection-Enhanced Pirani Sensor, 1/8 inch NPT-MQuote Only
103170012SHSeries 317 Shielded Convection-Enhanced Pirani Sensor, 8 VCR®-FQuote Only
103170013SHSeries 317 Shielded Convection-Enhanced Pirani Sensor, Mini 1-1/3 inches CFQuote Only
103170014SHSeries 317 Shielded Convection-Enhanced Pirani Sensor, 2-3/4 inches CFQuote Only
103170016SHSeries 317 Shielded Convection-Enhanced Pirani Sensor, 15mm tubeQuote Only
103170018SHSeries 317 Shielded Convection-Enhanced Pirani Sensor, 18mm tubeQuote Only
103170027SHSeries 317 Shielded Convection-Enhanced Pirani Sensor, NW 25 KFQuote Only
103170029SHSeries 317 Shielded Convection-Enhanced Pirani Sensor, 4 VCR®-FQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-652-4400.