901P Micro Pirani/Piezo Loadlock Vacuum Transducer
(1.0x10-5 to 1000 Torr) with Atmospheric Switching
Pressure/vacuum gauges with Piezo and MicroPirani™ vacuum sensors for load locks
Designed specifically for load lock environments, the 901 Plus (901P) Loadlock Transducer (LLT) combines Piezo and Micro Pirani™ vacuum sensor technology. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.