RPDG-100 10kW Pulsed DC Plasma Generator
Pulsed DC Generator 10 kilowatt High Frequency Asymmetric Bipolar Pulsed DC Power for Plasma Applications

photo - RPDG-100 10kW Pulsed DC Plasma Generator

RPDG-100 is a 10,000W Asymmetric Bipolar Pulsed DC generator that enables deposition of a wide variety of low defect films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN.


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Contact an Applications Specialist by sending an email to MKS Instruments or call 585-427-8300.