Modular Dissolved Ozone Delivery System
The LIQUOZON® HeliO3 is specially designed for solar applications such as cleaning, surface conditioning and oxide growth. The ozonated water delivery system is a powerful source for wet processing with ozone and/or chemical mixtures such as acids with ozone.
The system is comprised of at least two modules: a self-contained stand-alone Gas Module and a Wet Module that integrates in the customer's TOOL. Several combinations including closed loop control and special safety features are available.
The LIQUOZON® HeliO3 is designed to operate in either single pass or recirculation mode. Recirculation mode reduces chemical and water consumption saving on cost and water use.
As a part of the production-proven family of LIQUOZON® systems, the LIQUOZON® HeliO3 series is based on the same highly reliable ozone generating and contacting technology. Ozone is an environmentally friendly alternative to many process chemicals in the solar industry. It has a high redox potential, can be generated at the point-of-use, and is easily converted back to oxygen. Cost of purchase, storage and disposal of many chemicals can thus be reduced considerably.